Issued Patents All Time
Showing 76–84 of 84 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8637406 | Image transfer process employing a hard mask layer | Ryan O. Jung, Sivananda K. Kanakasabapathy | 2014-01-28 |
| 8586478 | Method of making a semiconductor device | Eiichi Soda, Sivananda K. Kanakasabapathy | 2013-11-19 |
| 8586482 | Film stack including metal hardmask layer for sidewall image transfer fin field effect transistor formation | John C. Arnold, Sivananda K. Kanakasabapathy, Stefan Schmitz | 2013-11-19 |
| 8580692 | Film stack including metal hardmask layer for sidewall image transfer fin field effect transistor formation | John C. Arnold, Sivananda K. Kanakasabapathy, Stefan Schmitz | 2013-11-12 |
| 8518824 | Self aligning via patterning | John C. Arnold, Sean D. Burns, Sivananda K. Kanakasabapathy | 2013-08-27 |
| 8470711 | Tone inversion with partial underlayer etch for semiconductor device formation | John C. Arnold, Sean D. Burns, Matthew E. Colburn, Steven J. Holmes | 2013-06-25 |
| 8298943 | Self aligning via patterning | John C. Arnold, Sean D. Burns, Sivananda K. Kanakasabapathy | 2012-10-30 |
| 8298954 | Sidewall image transfer process employing a cap material layer for a metal nitride layer | John C. Arnold, Sean D. Burns, Matthew E. Colburn, David V. Horak | 2012-10-30 |
| 8119531 | Mask and etch process for pattern assembly | John C. Arnold, Sean D. Burns, Matthew E. Colburn | 2012-02-21 |