Issued Patents All Time
Showing 26–37 of 37 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6525153 | Polycyclic polymers containing pendant cyclic anhydride groups | Saikumar Jayaraman, Brian L. Goodall, Richard Vicari, John-Henry Lipian, Robert David Allen +1 more | 2003-02-25 |
| 6451499 | Polycyclic resist compositions with increased etch resistance | Saikumar Jayaraman, Brian L. Goodall, Larry F. Rhodes, Robert A. Shick, Richard Vicari +3 more | 2002-09-17 |
| 6451945 | Modified polycyclic polymers | Saikumar Jayaraman, George M. Benedikt, Larry F. Rhodes, Richard Vicari, Robert David Allen +2 more | 2002-09-17 |
| 6420503 | Norbornene sulfonamide polymers | Saikumar Jayaraman, Richard Vicari, Larry F. Rhodes, Pushkara R. Varanasi, Ratnam Sooriyakumaran +4 more | 2002-07-16 |
| 6251560 | Photoresist compositions with cyclic olefin polymers having lactone moiety | Robert David Allen, Phillip Brock, Richard Anthony DiPietro, Hiroshi Ito, Hoa D. Truong +1 more | 2001-06-26 |
| 6177228 | Photoresist composition and process for its use | Robert David Allen, Richard Anthony DiPietro, Ratnam Sooriyakumaran, Gregory Michael Wallraff | 2001-01-23 |
| 6165673 | Resist composition with radiation sensitive acid generator | Gregory Breyta, Richard Anthony DiPietro, Donald C. Hofer, Hiroshi Ito, Robert David Allen +1 more | 2000-12-26 |
| 6165678 | Lithographic photoresist composition and process for its use in the manufacture of integrated circuits | Robert David Allen, Richard Anthony DiPietro, Ratnam Sooriyakumaran, Gregory Michael Wallraff | 2000-12-26 |
| 6147177 | Polycyclic resist compositions with increased etch resistance | Saikumar Jayaraman, Brian L. Goodall, Larry F. Rhodes, Robert A. Shick, Richard Vicari +3 more | 2000-11-14 |
| 5998099 | Energy-sensitive resist material and a process for device fabrication using an energy-sensitive resist material | Francis Houlihan, Omkaram Nalamasu | 1999-12-07 |
| 5879857 | Energy-sensitive resist material and a process for device fabrication using an energy-sensitive resist material | Edwin Arthur Chandross, Francis Houlihan, Omkaram Nalamasu, Elsa Reichmanis | 1999-03-09 |
| 5843624 | Energy-sensitive resist material and a process for device fabrication using an energy-sensitive resist material | Francis Houlihan, Omkaram Nalamasu, Elsa Reichmanis | 1998-12-01 |