Issued Patents All Time
Showing 26–38 of 38 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5516608 | Method for controlling a line dimension arising in photolithographic processes | Steven J. Holmes, Robert Jackson, Jerry Shaw, John L. Sturtevant, Theodore G. van Kessel | 1996-05-14 |
| 5432670 | Generation of ionized air for semiconductor chips | John S. Batchelder, Vaughn P. Gross, Robert A. Gruver, Kenneth D. Murray | 1995-07-11 |
| 5343290 | Surface particle detection using heterodyne interferometer | John S. Batchelder, Donald M. DeCain, Marc A. Taubenblatt | 1994-08-30 |
| 5316970 | Generation of ionized air for semiconductor chips | John S. Batchelder, Vaughn P. Gross, Robert A. Gruver, Kenneth D. Murray | 1994-05-31 |
| 5298975 | Combined scanning force microscope and optical metrology tool | Henri A. Khoury, Calvin K. Chi, Joachim Clabes, Laszlo Landstein, Martin P. O'Boyle +2 more | 1994-03-29 |
| 5294806 | Optical submicron aerosol particle detector | John S. Batchelder, Donald M. DeCain | 1994-03-15 |
| 5220403 | Apparatus and a method for high numerical aperture microscopic examination of materials | John S. Batchelder, Marc A. Taubenblatt | 1993-06-15 |
| 5208648 | Apparatus and a method for high numerical aperture microscopic examination of materials | John S. Batchelder, Marc A. Taubenblatt, Douglas W. Cooper | 1993-05-04 |
| 5204631 | System and method for automatic thresholding of signals in the presence of Gaussian noise | — | 1993-04-20 |
| 5192870 | Optical submicron aerosol particle detector | John S. Batchelder, Donald M. DeCain | 1993-03-09 |
| 5133602 | Particle path determination system | John S. Batchelder, Donald M. DeCain, Marc A. Taubenblatt | 1992-07-28 |
| 5134276 | Noise cancelling circuitry for optical systems with signal dividing and combining means | — | 1992-07-28 |
| 5116583 | Suppression of particle generation in a modified clean room corona air ionizer | John S. Batchelder, Vaughn P. Gross, Robert J. Miller, Kenneth D. Murray | 1992-05-26 |