Issued Patents All Time
Showing 26–33 of 33 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8722307 | Near-infrared absorptive layer-forming composition and multilayer film comprising near-infrared absorptive layer | Seiichiro Tachibana, Kazumi Noda, Masaki Ohashi, Takeshi Kinsho, Wu-Song Huang +2 more | 2014-05-13 |
| 8658050 | Method to transfer lithographic patterns into inorganic substrates | Sebastian U. Engelmann, Michael A. Guillorn | 2014-02-25 |
| 8652712 | Photoacid generators for extreme ultraviolet lithography | — | 2014-02-18 |
| 8586283 | Near-infrared absorbing film compositions | Dario L. Goldfarb, Wu-Song Huang, Wai-Kin Li, Sen Liu, Pushkara R. Varanasi +1 more | 2013-11-19 |
| 8395228 | Integration process to improve focus leveling within a lot process variation | Wai-Kin Li, Wu-Song Huang, Dario L. Goldfarb, Edward R. Engbrecht, Yiheng Xu | 2013-03-12 |
| 8293451 | Near-infrared absorbing film compositions | Dario L. Goldfarb, Wu-Song Huang, Wai-Kin Li, Sen Liu, Pushkara R. Varanasi +1 more | 2012-10-23 |
| 8039194 | Photoacid generators for extreme ultraviolet lithography | — | 2011-10-18 |
| 7655379 | Ionic, organic photoacid generators for DUV, MUV and optical lithography based on peraceptor-substituted aromatic anions | Sen Liu, Irene Popova | 2010-02-02 |