Issued Patents All Time
Showing 1–8 of 8 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8304178 | Top antireflective coating composition containing hydrophobic and acidic groups | Mahmoud Khojasteh, Wu-Song Huang, Margaret C. Lawson, Irene Popova, Pushkara R. Varanasi | 2012-11-06 |
| 8202678 | Wet developable bottom antireflective coating composition and method for use thereof | Kuang-Jung Chen, Mahmoud Khojasteh, Ranee W. Kwong, Margaret C. Lawson, Wenjie Li +1 more | 2012-06-19 |
| 7709187 | High resolution imaging process using an in-situ image modifying layer | Wu-Song Huang, Margaret C. Lawson, Jaione Tirapu Azpiroz | 2010-05-04 |
| 7608390 | Top antireflective coating composition containing hydrophobic and acidic groups | Mahmoud Khojasteh, Wu-Song Huang, Margaret C. Lawson, Irene Popova, Pushkara R. Varanasi | 2009-10-27 |
| 7563563 | Wet developable bottom antireflective coating composition and method for use thereof | Kuang-Jung Chen, Mahmoud Khojasteh, Ranee W. Kwong, Margaret C. Lawson, Wenjie Li +1 more | 2009-07-21 |
| 7544750 | Top antireflective coating composition with low refractive index at 193nm radiation wavelength | Wu-Song Huang, William H. Heath, Pushkara R. Varanasi | 2009-06-09 |
| 7217496 | Fluorinated photoresist materials with improved etch resistant properties | Mahmoud Khojasteh, Pushkara R. Varanasi, Wenjie Li, Kuang-Jung Chen | 2007-05-15 |
| 6892781 | Method and apparatus for application of pressure to a workpiece by thermal expansion | Dale Curtis McHerron, Christopher L. Tessler, Jerry A. Gorrell, James Edward Tersigni | 2005-05-17 |