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Method of fabricating a precision buried resistor |
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Post last wiring level inductor using patterned plate process |
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Post last wiring level inductor using patterned plate process |
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Micro-electromechanical sub-assembly having an on-chip transfer mechanism |
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2010-06-15 |
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Post last wiring level inductor using patterned plate process |
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2010-06-08 |
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Post last wiring level inductor using patterned plate process |
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Polysilicon containing resistor with enhanced sheet resistance precision and method for fabrication thereof |
Anil K. Chinthakindi, Douglas D. Coolbaugh, Ebenezer E. Eshun, Robert M. Rassel, Kunal Vaed |
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Post last wiring level inductor using patterned plate process |
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Post last wiring level inductor using patterned plate process |
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Low tolerance polysilicon resistor for low temperature silicide processing |
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2007-10-23 |
| 6831542 |
Micro-electromechanical inductive switch |
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