Issued Patents All Time
Showing 26–50 of 68 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5658472 | Method for producing deep vertical structures in silicon substrates | Johann W. Bartha, Robert Junginger, Georg Kraus | 1997-08-19 |
| 5646339 | Force microscope and method for measuring atomic forces in multiple directions | Thomas Bayer, Martin Nonnenmacher, deceased | 1997-07-08 |
| 5641610 | Method for producing a multi-step structure in a substrate | Johann W. Bartha, Karl Probst, Gerhard Schmid | 1997-06-24 |
| 5635337 | Method for producing a multi-step structure in a substrate | Johann W. Bartha, Karl Probst, Gerhard Schmid | 1997-06-03 |
| 5578745 | Calibration standards for profilometers and methods of producing them | Thomas Bayer, Yves Martin, Klaus Meissner, Helga Weiss | 1996-11-26 |
| 5534359 | Calibration standard for 2-D and 3-D profilometry in the sub-nanometer range and method of producing it | Johann W. Bartha, Thomas Bayer, Martin Nonnenmacher, deceased, Helga Weiss | 1996-07-09 |
| 5455419 | Micromechanical sensor and sensor fabrication process | Thomas Bayer | 1995-10-03 |
| 5427599 | System for stamping an optical storage disk | Gerhard Schmid, Werner Steiner, Gerhard Trippel, Olaf Wolter | 1995-06-27 |
| 5382795 | Ultrafine silicon tips for AFM/STM profilometry | Thomas Bayer, Yves Martin, Helga Weiss, Hemantha K. Wickramasinghe, Olaf Wolter | 1995-01-17 |
| 5304278 | Apparatus for plasma or reactive ion etching and method of etching substrates having a low thermal conductivity | Johann W. Bartha, Thomas Bayer, Dieter Kern, Volker Mattern, Roland Stoehr | 1994-04-19 |
| 5296091 | Method of etching substrates having a low thermal conductivity | Johann W. Bartha, Thomas Bayer, Dieter Kern, Volker Mattern, Roland Stoehr | 1994-03-22 |
| 5282924 | Micromechanical sensor fabrication process | Thomas Bayer | 1994-02-01 |
| 5283107 | Modular multilayer interwiring structure | Thomas Bayer, Willy Hildenbrand, Bernd Marquart, Roland Stohr, Olaf Wolter | 1994-02-01 |
| 5283437 | Pneumatically and electrostatically driven scanning tunneling microscope | Martin Nonnenmacher, deceased, Olaf Wolter | 1994-02-01 |
| 5242541 | Method of producing ultrafine silicon tips for the AFM/STM profilometry | Thomas Bayer, Yves Martin, Helga Weiss, Hemantha K. Wickramasinghe, Olaf Wolter | 1993-09-07 |
| 5213600 | Method of manufacturing an optical Storage disk | Gerhard Schmid, Werner Steiner, Gerhard Trippel, Olaf Wolter | 1993-05-25 |
| 5162133 | Process for fabricating silicon carbide films with a predetermined stress | Johann W. Bartha, Thomas Bayer, Georg Kraus, Olaf Wolter | 1992-11-10 |
| 5116462 | Method of producing micromechanical sensors for the AFM/STM profilometry | Johann W. Bartha, Thomas Bayer, Georg Kraus, Helga Weiss, Olaf Wolter | 1992-05-26 |
| 5051379 | Method of producing micromechanical sensors for the AFM/STM profilometry and micromechanical AFM/STM sensor head | Thomas Bayer, Georg Kraus, Helga Weiss, Olaf Wolter | 1991-09-24 |
| 4969415 | PECVD (plasma enhanced chemical vapor deposition) method for depositing of tungsten or layers containing tungsten by in situ formation of tungsten fluorides | Johann W. Bartha, Thomas Bayer, Georg Kraus, Gerhard Schmid | 1990-11-13 |
| 4918033 | PECVD (plasma enhanced chemical vapor deposition) method for depositing of tungsten or layers containing tungsten by in situ formation of tungsten fluorides | Johann W. Bartha, Thomas Bayer, Georg Kraus, Gerhard Schmid | 1990-04-17 |
| 4871418 | Process for fabricating arbitrarily shaped through holes in a component | Jurgen Wittlinger, Thomas Bayer, Johann W. Bartha | 1989-10-03 |
| 4857383 | Synthetic substrate with adhesive metal layer | Friedrich W. Schwerdt, Hans-Joachim Trumpp | 1989-08-15 |
| 4843315 | Contact probe arrangement for electrically connecting a test system to the contact pads of a device to be tested | Thomas Bayer, Michael Elsasser, Heinrich Schmid, Roland Stohr, Olaf Wolter +1 more | 1989-06-27 |
| 4806755 | Micromechanical atomic force sensor head | Urs T. Duerig, James K. Gimewski, Wolfgang D. Pohl, Olaf Wolter | 1989-02-21 |