Issued Patents All Time
Showing 26–29 of 29 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6552411 | DC or AC electric field assisted anneal | Arne Ballantine, John J. Ellis-Monaghan, Toshihura Furukawa, Glenn R. Miller, James A. Slinkman | 2003-04-22 |
| 6417070 | Method for forming a liner in a trench | Arne Ballantine, Jeffrey S. Brown, James J. Quinlivan, James A. Slinkman, Anthony C. Speranza | 2002-07-09 |
| 6339022 | Method of annealing copper metallurgy | Arne Ballantine, Edward C. Cooney, III, George A. Dunbar, III, Cheryl G. Faltermeier, Ronald D. Goldblatt +9 more | 2002-01-15 |
| 6271100 | Chemically enhanced anneal for removing trench stress resulting in improved bipolar yield | Arne Ballantine, Douglas D. Coolbaugh | 2001-08-07 |