Issued Patents All Time
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9460934 | Wet strip process for an antireflective coating layer | Martin Glodde, Wu-Song Huang, Takeshi Kinsho, Tsutomu Ogihara, Seiichiro Tachibana +1 more | 2016-10-04 |
| 9012133 | Removal of alkaline crystal defects in lithographic patterning | Dario L. Goldfarb, Ranee W. Kwong, Libor Vyklicky | 2015-04-21 |
| 8999625 | Silicon-containing antireflective coatings including non-polymeric silsesquioxanes | Martin Glodde, Wu-Song Huang, Ratnam Sooriyakumaran, Takeshi Kinsho, Tsutomu Ogihara +2 more | 2015-04-07 |
| 7799503 | Composite structures to prevent pattern collapse | Colin J. Brodsky, Allen H. Gabor | 2010-09-21 |