Issued Patents All Time
Showing 26–50 of 56 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7621180 | Flow sensor with metal film resistor | — | 2009-11-24 |
| 7563716 | Polishing method | Seiichi Kondo, Yoshio Homma, Kenichi Takeda, Kenji Hinode | 2009-07-21 |
| 7404320 | Flow sensor using a heat element and a resistance temperature detector formed of a metal film | Naoki Yamamoto, Kenichi Takeda, Hiroshi Fukuda | 2008-07-29 |
| 7279425 | Polishing method | Seiichi Kondo, Yoshio Homma, Kenichi Takeda, Kenji Hinode | 2007-10-09 |
| 7183212 | Polishing method, metallization fabrication method, method for manufacturing semiconductor device and semiconductor device | Seiichi Kondo, Masaaki Fujimori, Yoshio Homma | 2007-02-27 |
| 7132367 | Polishing method | Seiichi Kondo, Yoshio Homma, Kenichi Takeda, Kenji Hinode | 2006-11-07 |
| 7054956 | Multi-interval data acquisition apparatus | — | 2006-05-30 |
| 6905571 | Wafer polishing method and wafer polishing apparatus in semiconductor fabrication equipment | Kinji Tsunenari | 2005-06-14 |
| 6899603 | Polishing apparatus | Yoshio Homma, Seiichi Kondo, Youhei Yamada, Takeshi Kimura, Hiroki Nezu | 2005-05-31 |
| 6864584 | Semiconductor device | Yuko Hanaoka, Kenji Hinode, Kenichi Takeda, Daisuke Kodama | 2005-03-08 |
| 6855035 | Apparatus and method for producing substrate with electrical wire thereon | Yoshio Homma, Naofumi Ohashi, Toshinori Imai | 2005-02-15 |
| 6815357 | Process and apparatus for manufacturing a semiconductor device | Yoshio Homma, Hiroshi Nakano, Takeyuki Itabashi, Haruo Akahoshi | 2004-11-09 |
| 6774041 | Polishing method, metallization fabrication method, method for manufacturing semiconductor device and semiconductor device | Seiichi Kondo, Masaaki Fujimori, Yoshio Homma | 2004-08-10 |
| 6750128 | Methods of polishing, interconnect-fabrication, and producing semiconductor devices | Seiichi Kondo, Yoshio Homma | 2004-06-15 |
| 6719618 | Polishing apparatus | Yoshio Homma, Seiichi Kondo, Youhei Yamada, Takeshi Kimura, Hiroki Nezu | 2004-04-13 |
| 6680541 | Semiconductor device and process for producing the same | Takeshi Furusawa, Daisuke Ryuzaki, Shuntaro Machida, Kenji Hinode, Ryou Yoneyama | 2004-01-20 |
| 6638854 | Semiconductor device and method for manufacturing the same | Yoshio Homma, Seiichi Kondo, Naofumi Ohashi, Toshinori Imai, Hizuru Yamaguchi +1 more | 2003-10-28 |
| 6596638 | Polishing method | Seiichi Kondo, Yoshio Homma, Kenichi Takeda, Kenji Hinode | 2003-07-22 |
| 6565422 | Polishing apparatus using substantially abrasive-free liquid with mixture unit near polishing unit, and plant using the polishing apparatus | Yoshio Homma, Hiroki Nezu, Takeshi Kimura, Seiichi Kondo | 2003-05-20 |
| 6562719 | Methods of polishing, interconnect-fabrication, and producing semiconductor devices | Seiichi Kondo, Yoshio Homma | 2003-05-13 |
| 6561883 | Method of polishing | Seiichi Kondo, Yoshio Homma | 2003-05-13 |
| 6561875 | Apparatus and method for producing substrate with electrical wire thereon | Yoshio Homma, Naofumi Ohashi, Toshinori Imai | 2003-05-13 |
| 6358838 | Semiconductor device and process for producing the same | Takeshi Furusawa, Daisuke Ryuzaki, Shuntaro Machida, Kenji Hinode, Ryou Yoneyama | 2002-03-19 |
| 6326299 | Method for manufacturing a semiconductor device | Yoshio Homma, Seiichi Kondo, Naofumi Ohashi, Toshinori Imai, Hizuru Yamaguchi +1 more | 2001-12-04 |
| 6117775 | Polishing method | Seiichi Kondo, Yoshio Homma, Kenichi Takeda, Kenji Hinode | 2000-09-12 |