Issued Patents All Time
Showing 26–33 of 33 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8071477 | Method of manufacturing semiconductor device and substrate processing apparatus | Tetsuya Marubayashi, Yasuhiro Inokuchi | 2011-12-06 |
| 8025739 | Method of manufacturing semiconductor device | Kiyohisa ISHIBASHI, Yasuhiro Inokuchi, Yoshiaki Hashiba | 2011-09-27 |
| 8012885 | Manufacturing method of semiconductor device | Yasuhiro Inokuchi, Yasuhiro Ogawa | 2011-09-06 |
| 7851379 | Substrate processing method and substrate processing apparatus | Yasuhiro Inokuchi, Yasuo Kunii | 2010-12-14 |
| 6949474 | Method of manufacturing a semiconductor device and a semiconductor manufacture system | Yasuhiro Inokuchi, Yasuo Kunii, Junichi Murota | 2005-09-27 |
| 6872636 | Method for fabricating a semiconductor device | Yasuhiro Inokuchi, Takaaki Noda, Yasuo Kunii | 2005-03-29 |
| 6503079 | Substrate processing apparatus and method for manufacturing semiconductor device | Minoru Kogano, Yasuhiro Inokuchi, Makoto Sambu, Yasuo Kunii | 2003-01-07 |
| 4740290 | Process for thermal cracking of heavy oil | Tadayoshi Tomita, Katsutoshi Kikuchi, Takayuki Sakamoto, Toshihiro Ishida | 1988-04-26 |