Issued Patents All Time
Showing 26–39 of 39 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9318303 | Charged particle beam apparatus | Xin Man, Tatsuya Asahata | 2016-04-19 |
| 9287087 | Sample observation method, sample preparation method, and charged particle beam apparatus | Xin Man | 2016-03-15 |
| 9275827 | Charged particle beam apparatus having needle probe that tracks target position changes | Tatsuya Asahata, Hidekazu Suzuki, Yo Yamamoto | 2016-03-01 |
| 9245713 | Charged particle beam apparatus | Xin Man, Tatsuya Asahata | 2016-01-26 |
| 9218937 | Charged particle beam apparatus having improved needle movement control | Tatsuya Asahata, Hidekazu Suzuki, Yo Yamamoto | 2015-12-22 |
| 9202671 | Charged particle beam apparatus and sample processing method using charged particle beam apparatus | Xin Man, Tatsuya Asahata | 2015-12-01 |
| 9080945 | Cross-section processing and observation method and cross-section processing and observation apparatus | Xin Man, Tatsuya Asahata | 2015-07-14 |
| 9024280 | Composite charged particle beam apparatus | Yo Yamamoto, Tatsuya Asahata | 2015-05-05 |
| 8664598 | Electron microscope and specimen analyzing method | Masakatsu Hasuda, Toshiaki Fujii, Junichi Tashiro | 2014-03-04 |
| 8642980 | Composite charged particle beam apparatus | Xin Man, Yo Yamamoto, Tatsuya Asahata | 2014-02-04 |
| 7571639 | Method of correcting opaque defect of photomask using atomic force microscope fine processing device | Toshio Doi, Kazutoshi Watanabe, Osamu Takaoka | 2009-08-11 |
| 7442925 | Working method using scanning probe | Masatoshi Yasutake, Takuya Nakaue, Kazutoshi Watanabe, Osamu Takaoka, Naoya Watanabe +1 more | 2008-10-28 |
| 6852973 | Scanning charged particle microscope | Hidekazu Suzuki | 2005-02-08 |
| 6621082 | Automatic focusing system for scanning electron microscope equipped with laser defect detection function | Seiji Morita, Mitsuyoshi Sato | 2003-09-16 |