Issued Patents All Time
Showing 26–32 of 32 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6126512 | Robust belt tracking and control system for hostile environment | Mike Chao, Tim H. Huynh, CHI-WEN GUO | 2000-10-03 |
| 6028669 | Signal processing for in situ monitoring of the formation or removal of a transparent layer | — | 2000-02-22 |
| 6010538 | In situ technique for monitoring and controlling a process of chemical-mechanical-polishing via a radiative communication link | Mei Sun, Herbert E. Litvak, Daniel E. Glenn, Earl Jensen, Frank J. Hausman +1 more | 2000-01-04 |
| 6000997 | Temperature regulation in a CMP process | Shu-Hsin Kao, Shou-Sung Chang, Gregory C. Lee, Greg Simon, Harry W. Lee, Jr. +5 more | 1999-12-14 |
| 5934974 | In-situ monitoring of polishing pad wear | — | 1999-08-10 |
| 5801894 | Power-saving high performance data storage system | Zine-Eddine Boutaghou | 1998-09-01 |
| 5801905 | Actuator arm with cutouts and means for filling or blocking the cutouts | Neal Bertram Schirle | 1998-09-01 |