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Polishing system including a hydrostatic fluid bearing support |
David E. Weldon, Shu-Hsin Kao |
2005-04-05 |
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Hydrostatic fluid bearing support with adjustable inlet heights |
David E. Weldon, Shu-Hsin Kao |
2002-09-24 |
| 6244945 |
Polishing system including a hydrostatic fluid bearing support |
David E. Weldon, Shu-Hsin Kao |
2001-06-12 |
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Robust belt tracking and control system for hostile environment |
Mike Chao, CHI-WEN GUO, Huey-Ming Tzeng |
2000-10-03 |
| 6086456 |
Polishing method using a hydrostatic fluid bearing support having fluctuating fluid flow |
David E. Weldon, Shu-Hsin Kao |
2000-07-11 |
| 6062959 |
Polishing system including a hydrostatic fluid bearing support |
David E. Weldon, Shu-Hsin Kao |
2000-05-16 |