Issued Patents All Time
Showing 51–55 of 55 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6172321 | Method and apparatus for plasma processing apparatus | Ken Yoshioka, Saburou Kanai, Tetsunori Kaji, Ryoji Nishio | 2001-01-09 |
| 6034346 | Method and apparatus for plasma processing apparatus | Ken Yoshioka, Saburou Kanai, Tetsunori Kaji, Ryoji Nishio | 2000-03-07 |
| 5556204 | Method and apparatus for detecting the temperature of a sample | Naoyuki Tamura, Kazue Takahashi | 1996-09-17 |
| 5536359 | Semiconductor device manufacturing apparatus and method with optical monitoring of state of processing chamber | Hiroki Kawada, Kazue Takahashi, Saburo Kanai, Naoyuki Tamura | 1996-07-16 |
| 5259735 | Evacuation system and method therefor | Kazue Takahashi, Shinjiro Ueda, Naoyuki Tamura, Kazuaki Ichihashi | 1993-11-09 |