Issued Patents All Time
Showing 1–9 of 9 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10090195 | Method including a formation of a diffusion barrier and semiconductor structure including a diffusion barrier | Frank Koschinsky, Heiko Weber | 2018-10-02 |
| 9177858 | Methods for fabricating integrated circuits including barrier layers for interconnect structures | Xunyuan Zhang, Tibor Bolom, Kun Ho Ahn, Frank Koschinsky | 2015-11-03 |
| 9177826 | Methods of forming metal nitride materials | Frank Koschinsky | 2015-11-03 |
| 9171754 | Method including an etching of a portion of an interlayer dielectric in a semiconductor structure, a degas process and a preclean process | Frank Koschinsky, Oliver Witnik | 2015-10-27 |
| 9147618 | Method for detecting defects in a diffusion barrier layer | Frank Koschinsky, Dirk Utess | 2015-09-29 |
| 8138538 | Interconnect structure for semiconductor devices | Hans-Peter Moll, Gouri Sankar Kar, Martin Popp, Lars Heineck, Peter Lahnor +8 more | 2012-03-20 |
| 7880212 | Method for producing a dielectric interlayer and storage capacitor with such a dielectric interlayer | Henry Bernhardt, Frank Bernhardt | 2011-02-01 |
| 7531418 | Method of producing a conductive layer including two metal nitrides | Stephan Kudelka, Jonas Sundqvist | 2009-05-12 |
| 7416952 | Method for producing a dielectric interlayer and storage capacitor with such a dielectric interlayer | Henry Bernhardt, Frank Bernhardt | 2008-08-26 |