Issued Patents All Time
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11127674 | Back end of the line metal structure and method | Dirk Breuer, Carla Byloos, Holger Schuehrer | 2021-09-21 |
| 9171754 | Method including an etching of a portion of an interlayer dielectric in a semiconductor structure, a degas process and a preclean process | Frank Koschinsky, Bernd Hintze | 2015-10-27 |