Issued Patents All Time
Showing 26–28 of 28 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7879732 | Thin film etching method and semiconductor device fabrication using same | Xiang Hu, Pradeep Ramachandramurthy Yelehanka, Mei Sheng Zhou | 2011-02-01 |
| 7745320 | Method for reducing silicide defects in integrated circuits | Jeff Jianhui Ye, Huang Liu, Alex See, Wei Lu, Hui Peng Koh +2 more | 2010-06-29 |
| 7247555 | Method to control dual damascene trench etch profile and trench depth uniformity | Yong Kong Siew, Liang-Choo Hsia | 2007-07-24 |