Issued Patents All Time
Showing 51–69 of 69 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8530148 | Pattern forming method, resist composition for multiple development used in the pattern forming method, developer for negative development used in the pattern forming method, and rinsing solution for negative development used in the pattern forming method | Shinichi Kanna | 2013-09-10 |
| 8476001 | Pattern forming method | — | 2013-07-02 |
| 8431330 | Surface-treating agent for pattern formation and pattern-forming method using the surface-treating agent | Wataru HOSHINO, Masahiro Yoshidome | 2013-04-30 |
| 8241840 | Pattern forming method, resist composition to be used in the pattern forming method, negative developing solution to be used in the pattern forming method and rinsing solution for negative development to be used in the pattern forming method | Shinji Tarutani, Kazuyoshi Mizuyoshi, Kenji Wada, Wataru HOSHINO | 2012-08-14 |
| 8227183 | Pattern forming method, resist composition for multiple development used in the pattern forming method, developer for negative development used in the pattern forming method, and rinsing solution for negative development used in the pattern forming method | Shinichi Kanna | 2012-07-24 |
| 8088557 | Method of forming patterns | — | 2012-01-03 |
| 8088566 | Surface-treating agent for pattern formation and pattern-forming method using the surface-treating agent | Wataru HOSHINO, Masahiro Yoshidome | 2012-01-03 |
| 8088550 | Positive resist composition and pattern forming method | Shinji Tarutani, Kenji Wada | 2012-01-03 |
| 8071272 | Method of forming patterns | — | 2011-12-06 |
| 8034547 | Pattern forming method, resist composition to be used in the pattern forming method, negative developing solution to be used in the pattern forming method and rinsing solution for negative development to be used in the pattern forming method | Shinji Tarutani, Kazuyoshi Mizutani, Kenji Wada, Wataru HOSHINO | 2011-10-11 |
| 8017298 | Method of forming patterns | — | 2011-09-13 |
| 8017304 | Pattern forming method, and resist composition, developer and rinsing solution used in the pattern forming method | Shinji Tarutani, Kazuyoshi Mizutani, Kenji Wada, Wataru HOSHINO | 2011-09-13 |
| 7998655 | Method of forming patterns | — | 2011-08-16 |
| 7985534 | Pattern forming method | — | 2011-07-26 |
| 7851140 | Resist composition for negative tone development and pattern forming method using the same | — | 2010-12-14 |
| 7824836 | Photosensitive composition and pattern forming method using the same | — | 2010-11-02 |
| 7799505 | Photosensitive composition, compound for use in the photosensitive composition and pattern forming method using the photosensitive composition | Kunihiko Kodama, Tomotaka Tsuchimura, Hiroshi Saegusa | 2010-09-21 |
| 7700261 | Positive photosensitive composition and a pattern-forming method using the same | Kunihiko Kodama, Kaoru Iwato, Norihiko Taguchi | 2010-04-20 |
| 7338744 | Positive resist composition and pattern forming method using the same | Shinji Tarutani | 2008-03-04 |