Issued Patents All Time
Showing 1–17 of 17 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9122151 | Resist composition, resist film therefrom and method of forming negative pattern using the composition | Kana Fujii, Hidenori Takahashi | 2015-09-01 |
| 8945810 | Positive resist composition and pattern-forming method | Hiromi Kanda | 2015-02-03 |
| 8753792 | Positive photosensitive composition and pattern forming method using the same | Kunihiko Kodama | 2014-06-17 |
| 8241833 | Positive resist composition and pattern-forming method using the same | Hiromi Kanda | 2012-08-14 |
| 8012665 | Positive photosensitive composition and pattern forming method using the same | Kunihiko Kodama | 2011-09-06 |
| 7998654 | Positive resist composition and pattern-forming method | Hiromi Kanda | 2011-08-16 |
| 7811740 | Positive resist composition and pattern-forming method using the same | Hiromi Kanda | 2010-10-12 |
| 7592126 | Positive resist composition and pattern forming method using the resist composition | — | 2009-09-22 |
| 7465528 | Positive-working photosensitive composition and pattern forming method using the same | Kunihiko Kodama | 2008-12-16 |
| 7326516 | Resist composition for immersion exposure and pattern formation method using the same | Hyou Takahashi | 2008-02-05 |
| 7122589 | Positive resist composition and pattern formation method using the same | Kenichiro Sato, Kunihiko Kodama | 2006-10-17 |
| 6756179 | Positive resist composition | Toru Fujimori, Kunihiko Kodama, Shinichi Kanna | 2004-06-29 |
| 6727033 | Positive resist composition | Toru Fujimori | 2004-04-27 |
| 6692883 | Positive photoresist composition | Toru Fujimori, Shiro Tan | 2004-02-17 |
| 6537718 | Positive photoresist composition for exposure to far ultraviolet ray | Toru Fujimori | 2003-03-25 |
| 6376152 | Positive photoresist composition | Yasumasa Kawabe, Shinichi Kanna | 2002-04-23 |
| 5358824 | Photosensitive resin composition utilizing 1,2-naphthoquinone diazide compound having spirobichroman or spirobiindane ring | Shiro Tan, Yasunori Takata, Yoshimasa Aotani | 1994-10-25 |