Issued Patents All Time
Showing 26–43 of 43 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9594014 | Installation structure of length meter for measuring a displacement of an object placed in vacuum | — | 2017-03-14 |
| D776621 | Electrical contact | — | 2017-01-17 |
| 9508526 | Top opening-closing mechanism and inspection apparatus | — | 2016-11-29 |
| D771571 | Electrical contact | — | 2016-11-15 |
| 8067732 | Electron beam apparatus | Mamoru Nakasuji, Takeshi Murakami, Tohru Satake, Tsutomi Karimata, Toshifumi Kimba +4 more | 2011-11-29 |
| 7645126 | Vacuum pump and semiconductor manufacturing apparatus | Shinichi Sekiguchi | 2010-01-12 |
| 6953317 | Turbo-molecular pump | Tetsuma Ikegami, Hiroyuki Kawasaki | 2005-10-11 |
| 6926493 | Turbo-molecular pump | Hiroaki Ogamino, Tetsuma Ikegami, Hiroyuki Kawasaki | 2005-08-09 |
| 6793466 | Vacuum pump | — | 2004-09-21 |
| 6617722 | Magnetic levitation rotating machine | Atsushi Ooyama, Toshiharu Nakazawa | 2003-09-09 |
| 6589009 | Turbo-molecular pump | Atsushi Shiokawa, Hiroyuki Kawasaki, Hiroshi Sobukawa, Hiroaki Ogamino | 2003-07-08 |
| 6514348 | Substrate processing apparatus | — | 2003-02-04 |
| 6398524 | Magnetic bearing control device and turbo-molecular pump device | Akiko Taira, Hiroyuki Chino, Toshiharu Nakazawa | 2002-06-04 |
| 6332752 | Turbo-molecular pump | Tetsuma Ikegami, Hiroyuki Kawasaki | 2001-12-25 |
| 6220831 | Turbomolecular pump | Atsushi Shiokawa, Hiroshi Sobukawa, Toshiharu Nakazawa | 2001-04-24 |
| 6217278 | Turbomolecular pump | Atsushi Shiokawa, Hirosi Sobukawa | 2001-04-17 |
| 6062810 | Turbomolecular pump | Hiroshi Sobukawa, Toshiharu Nakazawa, Atsushi Shiokawa, Junichi Arami | 2000-05-16 |
| 5679992 | Bearing unit | Shun-ichi Aiyoshizawa, Toshiharu Nakazawa | 1997-10-21 |