Issued Patents All Time
Showing 26–33 of 33 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6691430 | High-pressure drying apparatus, high-pressure drying method and substrate processing apparatus | Kimitsugu Saito, Ryuji Kitakado, Takashi Miyake, Tomomi Iwata, Ikuo Mizobata | 2004-02-17 |
| 6465765 | Fluid heating apparatus | Masakazu Katayama, Seiji Oku, Tomonori Kojimaru | 2002-10-15 |
| 6074515 | Apparatus for processing substrates | Izuru Iseki, Seiichiro Sato | 2000-06-13 |
| 6067727 | Apparatus and method for drying substrates | — | 2000-05-30 |
| 5826601 | Treating liquid replacing method, substrate treating method and substrate treating apparatus | Tutomu Takeuchi | 1998-10-27 |
| 5520744 | Device for rinsing and drying substrate | Kazonori Fujikawa, Masato Tanaka | 1996-05-28 |
| 4849608 | Apparatus for heat-treating wafers | Atsushi Tamada, Takamasa Sakai, Hitoshi Haibara, Keiji Nakagawa | 1989-07-18 |
| 4803948 | Heat processing apparatus for semiconductor manufacturing | Keiji Nakagawa, Ikuyoshi Nakatani, Takamasa Sakai | 1989-02-14 |