Issued Patents All Time
Showing 1–7 of 7 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7017637 | Thin film forming apparatus and thin film forming method | Tsutomu Ueyama, Norio Sato, Katsuyuki Machida, Hakaru Kyuragi | 2006-03-28 |
| 6926057 | Thin film forming apparatus and thin film forming method | Tsutomu Ueyama | 2005-08-09 |
| 6918421 | Thin film forming apparatus and thin film forming method | Tsutomu Ueyama | 2005-07-19 |
| 6893805 | Substrate processing apparatus and substrate processing method | Tsutomu Ueyama | 2005-05-17 |
| 6174371 | Substrate treating method and apparatus | Tetsuro Yamashita | 2001-01-16 |
| 6074515 | Apparatus for processing substrates | Seiichiro Sato, Yusuke Muraoka | 2000-06-13 |
| 4925388 | Apparatus for heat treating substrates capable of quick cooling | Akihiro Higashi, Seihiro Sasaki | 1990-05-15 |