Issued Patents All Time
Showing 1–14 of 14 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7017637 | Thin film forming apparatus and thin film forming method | Izuru Iseki, Norio Sato, Katsuyuki Machida, Hakaru Kyuragi | 2006-03-28 |
| 6926057 | Thin film forming apparatus and thin film forming method | Izuru Iseki | 2005-08-09 |
| 6918421 | Thin film forming apparatus and thin film forming method | Izuru Iseki | 2005-07-19 |
| 6911088 | Substrate processing apparatus and slit nozzle | Hiroyuki Kitazawa | 2005-06-28 |
| 6893805 | Substrate processing apparatus and substrate processing method | Izuru Iseki | 2005-05-17 |
| 6859616 | Apparatus for and method of heat treatment by light irradiation | Tatsufumi Kusuda | 2005-02-22 |
| 5916366 | Substrate spin treating apparatus | Akira Izumi, Hideki Adachi | 1999-06-29 |
| 5571325 | Subtrate processing apparatus and device for and method of exchanging substrate in substrate processing apparatus | Hideki Adachi, Yoshio Matsumura, Yasuhide Tanaka | 1996-11-05 |
| 4847634 | Method and apparatus for correcting snaking in a rollfilm feeding apparatus | Kenji Kawai, Masakzu Ohtorii, Takumi Yoshida | 1989-07-11 |
| 4770404 | Method and device for loading and unloading a film on and out of a rotary drum in the exposure/recording apparatus | Yoshito Koyama, Koji Yao | 1988-09-13 |
| 4757223 | Linear actuator | — | 1988-07-12 |
| 4743792 | Piezoelectric motor | — | 1988-05-10 |
| 4707123 | Film end holding device | — | 1987-11-17 |
| 4642701 | Device of switching a scanning beam diameter | Kiyoshi Maeda | 1987-02-10 |