Issued Patents All Time
Showing 26–35 of 35 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6749351 | Apparatus for developing substrate | Masahiko Harumoto | 2004-06-15 |
| 6692165 | Substrate processing apparatus | Akiko Tanaka, Osamu Tamada, Masahiko Harumoto, Kayoko Nakano | 2004-02-17 |
| 6656277 | Apparatus for and method of processing substrate | Masahiko Harumoto, Hiroshi Kobayashi, Minobu Matsunaga | 2003-12-02 |
| 6645880 | Treating solution applying method | Kazuhito Shigemori | 2003-11-11 |
| 6558053 | Substrate processing apparatus | Kazuhito Shigemori, Minobu Matsunaga, Katsushi Yoshioka, Kenji Sugimoto, Kaoru Aoki +7 more | 2003-05-06 |
| 6440218 | Coating solution applying method and apparatus | Kayoko Nakano, Shigehiro Goto, Minobu Matsunaga | 2002-08-27 |
| 5989632 | Coating solution applying method and apparatus | Masahiro Mimasaka | 1999-11-23 |
| 5985357 | Treating solution supplying method and apparatus | — | 1999-11-16 |
| 5976620 | Coating solution applying method and apparatus | Minobu Matsunaga | 1999-11-02 |
| 5843527 | Coating solution applying method and apparatus | — | 1998-12-01 |