Issued Patents All Time
Showing 26–35 of 35 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7492509 | Projection optical system | Aurelian Dodoc, Wilhelm Ulrich, Alexander Epple | 2009-02-17 |
| 7411201 | Projection objective for a microlithographic projection exposure apparatus | Aurelian Dodoc | 2008-08-12 |
| 7408716 | Refractive projection objective for immersion lithography | Aurelian Dodoc, Alexander Epple, Helmut Beierl | 2008-08-05 |
| 7382540 | Refractive projection objective | Karl-Heinz Schuster, Russell Hudyma, Wilhelm Ulrich, Rolf Freimann | 2008-06-03 |
| 7312847 | Refractive projection objective for immersion lithography | Wilhelm Ulrich | 2007-12-25 |
| 7277231 | Projection objective of a microlithographic exposure apparatus | Karl-Heinz Schuster, Aurelian Dodoc | 2007-10-02 |
| 7190527 | Refractive projection objective | Karl-Heinz Schuster, Russell Hudyma, Wilhelm Ulrich, Rolf Freimann | 2007-03-13 |
| 7187503 | Refractive projection objective for immersion lithography | Aurelian Dodoc, Alexander Epple, Helmut Beierl | 2007-03-06 |
| 6906866 | Compact 1½-waist system for sub 100 nm ArF lithography | Russell Hudyma, Wilhelm Ulrich | 2005-06-14 |
| 6891596 | Refractive projection objective for immersion lithography | Wilhelm Ulrich | 2005-05-10 |