Issued Patents All Time
Showing 1–7 of 7 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10403995 | Electrical connector, electronic component, and assembly method | Calogero Mauro Buscemi, Markus Strelow, Chistian Schrettlinger, Frank Wolf, Steffen Burger +3 more | 2019-09-03 |
| 10151982 | Illumination system of a microlithographic projection exposure apparatus with a birefringent element | Damian Fiolka, Ingo Saenger | 2018-12-11 |
| 10088754 | Illumination system for microlithography | Axel Scholz, Frank Schlesener, Nils Haverkamp, Vladimir Davydenko, Michael Gerhard +8 more | 2018-10-02 |
| 9606441 | Illumination system for microlithography | Axel Scholz, Frank Schlesener, Nils Haverkamp, Vladimir Davydenko, Michael Gerhard +8 more | 2017-03-28 |
| 9316920 | Illumination system of a microlithographic projection exposure apparatus with a birefringent element | Damian Fiolka, Ingo Saenger | 2016-04-19 |
| 9280060 | Illumination system for microlithography | Axel Scholz, Frank Schlesener, Nils Haverkamp, Vladimir Davydenko, Michael Gerhard +8 more | 2016-03-08 |
| 8873023 | Illumination system for microlithography | Axel Scholz, Frank Schlesener, Nils Haverkamp, Vladimir Davydenko, Michael Gerhard +8 more | 2014-10-28 |