Issued Patents All Time
Showing 51–68 of 68 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6827783 | Paste application apparatus and method for applying paste | Motoyuki Okeshi | 2004-12-07 |
| 6818430 | Process for producing L-epi-2-inosose and novel process for producing epi-inositol | Atsushi Takahashi, Kenji Kanbe, Yuichi Kita, Tsuyoshi Tamamura, Tomio Takeuchi | 2004-11-16 |
| 6754549 | Parts mounting apparatus and parts checking method by the same | Takaaki Yokoi, Hiroshi Uchiyama, Kenji Kamakura | 2004-06-22 |
| 6608666 | Reference plate, exposure apparatus, device manufacturing system, device manufacturing method, semiconductor manufacturing factory, and exposure apparatus maintenance method | Nobuyoshi Deguchi | 2003-08-19 |
| 6280062 | Light source device and illumination system | Shinichi Shima | 2001-08-28 |
| 6268902 | Exposure apparatus, and manufacturing method for devices using same | — | 2001-07-31 |
| 6091481 | Positioning method and projection exposure apparatus using the method | — | 2000-07-18 |
| 5999270 | Projection exposure apparatus and microdevice manufacturing method using the same | Masao Kosugi | 1999-12-07 |
| 5971577 | Light source device and illumination system | Shinichi Shima | 1999-10-26 |
| 5814425 | Method of measuring exposure condition and/or aberration of projection optical system | Yoshiharu Kataoka | 1998-09-29 |
| 5751404 | Exposure apparatus and method wherein alignment is carried out by comparing marks which are incident on both reticle stage and wafer stage reference plates | Eiichi Murakami, Fumio Sakai, Shigeyuki Uzawa, Shigeki Ogawa | 1998-05-12 |
| 5731193 | Recombinant DNA and transformant containing the same | Kozo Yamamoto, Tsunetaka Ohta | 1998-03-24 |
| 5594549 | Position detecting method and projection exposure apparatus using the same | Eiichi Murakami, Hirohiko Shinonaga | 1997-01-14 |
| 5331371 | Alignment and exposure method | Akiyoshi Suzuki | 1994-07-19 |
| 5309197 | Projection exposure apparatus | Akiyoshi Suzuki, Hideki Ina | 1994-05-03 |
| 5268744 | Method of positioning a wafer with respect to a focal plane of an optical system | Akiyoshi Suzuki | 1993-12-07 |
| 5166754 | Alignment system | Akiyoshi Suzuki | 1992-11-24 |
| 4800655 | Solvent recovery system | Hitoshi Tamazumi | 1989-01-31 |