Issued Patents All Time
Showing 1–10 of 10 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7924398 | Optical apparatus and method of manufacturing device | — | 2011-04-12 |
| 7570344 | Exposure apparatus and device manufacturing method | Yasuo Takama | 2009-08-04 |
| 7154581 | Scanning exposure apparatus, manufacturing method thereof, and device manufacturing method | — | 2006-12-26 |
| 7016012 | Exposure apparatus | — | 2006-03-21 |
| 6822727 | Exposure apparatus, method of manufacturing semiconductor devices, semiconductor manufacturing plant, method of maintaining exposure apparatus, and position detector | — | 2004-11-23 |
| 6738128 | Exposure apparatus | Kohei Maeda | 2004-05-18 |
| 6699628 | Aligning method for a scanning projection exposure apparatus | — | 2004-03-02 |
| 6693700 | Scanning projection exposure apparatus | — | 2004-02-17 |
| 6280062 | Light source device and illumination system | Tetsuya Mori | 2001-08-28 |
| 5971577 | Light source device and illumination system | Tetsuya Mori | 1999-10-26 |