Issued Patents All Time
Showing 101–125 of 174 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6636303 | Foreign substance inspecting method and apparatus, which detect a height of a foreign substance, and an exposure apparatus using this inspecting apparatus | Hideki Ina, Koichi Sentoku | 2003-10-21 |
| 6633102 | Insulator for armature of dynamo-electric machine | Kenji Nagai, Hiroaki Kondo, Hisanobu Higashi | 2003-10-14 |
| 6605392 | X-ray mask structure, and X-ray exposure method and apparatus using the same | Keiko Chiba | 2003-08-12 |
| 6559924 | Alignment method, alignment apparatus, profiler, exposure apparatus, exposure apparatus maintenance method, semiconductor device manufacturing method, and semiconductor manufacturing factory | Hideki Ina, Koichi Sentoku | 2003-05-06 |
| 6421124 | Position detecting system and device manufacturing method using the same | Koichi Sentoku | 2002-07-16 |
| 6372308 | Liquid crystal composition | Yasue Yoshioka, Masahiro Johno, Tomoyuki Yui | 2002-04-16 |
| 6344892 | Exposure apparatus and device manufacturing method using same | Mitsuro Sugita, Akiyoshi Suzuki | 2002-02-05 |
| 6304318 | Lithography system and method of manufacturing devices using the lithography system | — | 2001-10-16 |
| 6285033 | Positional deviation detecting method and device manufacturing method using the same | — | 2001-09-04 |
| 6258296 | Fluorine-substituted compounds and ferrielectric liquid-crystal composition containing the same | Masahiro Johno, Yuki Motoyama, Hiroshi Mineta, Tomoyuki Yui | 2001-07-10 |
| 6217954 | Phenyl triester compound and anti-ferroelectric liquid crystal composition containing the same | Yuki Motoyama, Masahiro Johno, Tomoyuki Yui | 2001-04-17 |
| 6171884 | Method of manufacturing a chip type electronic element | Masuyoshi Houda | 2001-01-09 |
| 6151095 | Anti-ferroelectric liquid crystal cell | Yasushi Suzuki, Akira Suguro, Tomoyuki Yui, Masahiro Johno | 2000-11-21 |
| 6151120 | Exposure apparatus and method | Hideki Ina | 2000-11-21 |
| 6001278 | Anti-ferroelectric liquid crystal composition | Masahiro Johno, Tomoyuki Yui, Yuki Motoyama | 1999-12-14 |
| 5980780 | Racemic compound and anti-ferroelectric liquid crystal composition containing the compound | Yuki Motoyama, Tomoyuki Yui, Masahiro Johno | 1999-11-09 |
| 5976409 | Swallow-tail-shaped liquid crystal compound | Hiroshi Mineta, Masahiro Johno, Tomoyuki Yui | 1999-11-02 |
| 5951914 | Racemic compound and anti-ferroelectric liquid crystal composition | Hiroshi Mineta, Tomoyuki Yui, Masahiro Johno | 1999-09-14 |
| 5938973 | Swallow-tailed compound and ferrielectric liquid crystal composition containing the same | Yuki Motoyama, Tomoyuki Yui, Masahiro Johno | 1999-08-17 |
| 5881596 | Urine sampling vessel | Akira Tsuji, Ichiro Morimoto | 1999-03-16 |
| 5847974 | Measuring method and apparatus for measuring system having measurement error changeable with time | Tetsuzo Mori, Koichi Sentoku, Noriyasu Hasegawa | 1998-12-08 |
| 5818588 | Displacement measuring method and apparatus using plural light beam beat frequency signals | Koichi Sentoku | 1998-10-06 |
| 5782960 | Hydrogen separation member | Makoto Ogawa, Toshiro Kobayashi, Minoru Sueda, Tetsuya Imai, Shigenori Shirogane +3 more | 1998-07-21 |
| 5751426 | Positional deviation measuring device and method for measuring the positional deviation between a plurality of diffraction gratings formed on the same object | Noriyuki Nose, Minoru Yoshii, Kenji Saitoh, Hiroshi Osawa, Koichi Sentoku +1 more | 1998-05-12 |
| 5728864 | Liquid crystal compound having ferrielectric phase and liquid crystal composition | Yuki Motoyama, Tomoyuki Yui, Masahiro Johno, Maki Ito, Hiroshi Mineta | 1998-03-17 |