Issued Patents All Time
Showing 76–100 of 174 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7528966 | Position detection apparatus and exposure apparatus | — | 2009-05-05 |
| 7447249 | Lighting system | Masayuki Kanechika | 2008-11-04 |
| 7408647 | Surface plasmon resonance sensor device | Makoto Tomita | 2008-08-05 |
| 7388943 | Method for adjusting gap between two objects and exposure method using the same, gap adjusting apparatus, and exposure apparatus | — | 2008-06-17 |
| 7385700 | Management system, apparatus, and method, exposure apparatus, and control method therefor | Hideki Ina, Takehiko Suzuki, Koichi Sentoku, Satoru Oishi | 2008-06-10 |
| 7382134 | Superconducting magnet apparatus for MRI | — | 2008-06-03 |
| 7373213 | Management system and apparatus, method therefor, and device manufacturing method | Satoru Oishi, Hideki Ina, Takehiko Suzuki, Koichi Sentoku | 2008-05-13 |
| 7271882 | Shape measuring apparatus, shape measuring method, and aligning method | Hideki Ina, Koichi Sentoku | 2007-09-18 |
| 7265841 | Position detecting method | — | 2007-09-04 |
| 7253885 | Wavelength selecting method, position detecting method and apparatus, exposure method and apparatus, and device manufacturing method | — | 2007-08-07 |
| 7229566 | Position detecting method and apparatus | Hideki Ina | 2007-06-12 |
| 7205767 | Magnetic apparatus, installation method for magnetic apparatus, and magnetic resonance imaging diagnosis system | Seijirou Itou | 2007-04-17 |
| 7190455 | Alignment method and apparatus and exposure apparatus | — | 2007-03-13 |
| 7190760 | Method for adjusting gap between two objects and exposure method using the same, gap adjusting apparatus, and exposure apparatus | — | 2007-03-13 |
| 7103497 | Position detecting device and position detecting method | Hideki Ina | 2006-09-05 |
| 7075618 | Apparatus control system, apparatus control method, semiconductor exposure apparatus, semiconductor exposure apparatus control method and semiconductor device manufacturing method | Hideki Ina, Takehiko Suzuki, Koichi Sentoku, Satoru Oishi | 2006-07-11 |
| 7069104 | Management system, management apparatus, management method, and device manufacturing method | Takehiko Suzuki, Hideki Ina, Koichi Sentoku, Satoru Oishi | 2006-06-27 |
| 7062010 | Method for adjusting gap between two objects and exposure method using the same, gap adjusting apparatus, and exposure apparatus | — | 2006-06-13 |
| 7010380 | Management system, management method and apparatus, and management apparatus control method | Koichi Sentoku, Hideki Ina, Takehiko Suzuki, Satoru Oishi | 2006-03-07 |
| 6999893 | Position detecting device and position detecting method | Hideki Ina | 2006-02-14 |
| 6992767 | Management system, apparatus, and method, exposure apparatus, and control method therefor | Hideki Ina, Takehiko Suzuki, Koichi Sentoku, Satoru Oishi | 2006-01-31 |
| 6950179 | Shape measuring apparatus, shape measuring method, and aligning method | Hideki Ina, Koichi Sentoku | 2005-09-27 |
| 6911468 | Tyrosine phosphatase inhibitors | Nozomi Katayama, Hiroshi Mabuchi | 2005-06-28 |
| 6785583 | Management system and apparatus, method therefor, and device manufacturing method | Satoru Oishi, Hideki Ina, Takehiko Suzuki, Koichi Sentoku | 2004-08-31 |
| 6649923 | Positional deviation detecting method and device manufacturing method using the same | — | 2003-11-18 |