Issued Patents All Time
Showing 26–50 of 174 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9952440 | Imprint apparatus, illumination optical system, and article manufacturing method | — | 2018-04-24 |
| 9892949 | Imprint method, imprint apparatus, and article manufacturing method | Kazuki Nakagawa, Noriyasu Hasegawa, Yosuke Murakami | 2018-02-13 |
| 9835639 | Gripping mechanism | Kazuyuki Oguri, Tomohiro Endo, Toshiaki Ohtake, Hidenobu Kawada | 2017-12-05 |
| 9711255 | Ultraviolet-emitting material and ultraviolet light source | Hiroyuki Kato, Kazufumi Tanaka | 2017-07-18 |
| 9689665 | Position detection apparatus, imprint apparatus, and method for manufacturing device | — | 2017-06-27 |
| 9625836 | Interferometer, lithography apparatus, and method of manufacturing article | Wataru Yamaguchi, Hideki Ina | 2017-04-18 |
| 9566741 | Imprint method, imprint apparatus, and article manufacturing method | Kazuki Nakagawa, Noriyasu Hasegawa, Yosuke Murakami | 2017-02-14 |
| 9467088 | Power generation device, thermal power generation method and solar power generation method | — | 2016-10-11 |
| 9394447 | Insulated ultrafine powder, method for producing same, and high dielectric constant resin composite material | Hirotaka Tsuruya, Hajime Ban, Reiki Akita | 2016-07-19 |
| 9315673 | Insulated ultrafine powder, method for producing same, and high dielectric constant resin composite material | Hirotaka Tsuruya, Hajime Ban, Reiki Akita | 2016-04-19 |
| 9275846 | Light source device and filament | Takao Saito, Yasuyuki Kawakami | 2016-03-01 |
| 9252007 | Light source device, method for manufacturing the same and filament | Shigemi Suzuki | 2016-02-02 |
| 9252006 | Incandescent bulb, filament, and method for manufacturing filament | — | 2016-02-02 |
| 9214330 | Light source device and filament | Yasuyuki Kawakami, Takao Saito, Kei EMOTO | 2015-12-15 |
| 9201298 | Imprint method, imprint apparatus, and article manufacturing method | Kazuki Nakagawa, Noriyasu Hasegawa, Yosuke Murakami | 2015-12-01 |
| 8916549 | Thienooxazepine derivative | Izumi Nomura | 2014-12-23 |
| 8902430 | Measuring apparatus and exposure device | Wataru Yamaguchi, Ryo Sasaki | 2014-12-02 |
| 8878141 | Drawing apparatus, and method of manufacturing article | Wataru Yamaguchi | 2014-11-04 |
| 8841842 | Light source device | — | 2014-09-23 |
| 8749761 | Displacement measurement device, exposure apparatus, and working device | Wataru Yamaguchi | 2014-06-10 |
| 8729509 | Drawing apparatus and method of manufacturing article | Wataru Yamaguchi | 2014-05-20 |
| 8717563 | Light scattering type particle detector using scattered light of surface plasmon resonance photons | Fumio Kubo, Koichi Okamoto, Yasuyuki Kawakami | 2014-05-06 |
| 8625074 | Exposure apparatus and device fabrication method | — | 2014-01-07 |
| 8564761 | Surface shape measuring apparatus, exposure apparatus, and device manufacturing method | Wataru Yamaguchi, Hideki Ina | 2013-10-22 |
| 8564186 | Light source apparatus having a solid light source element and a phosphor | Yasuyuki Kawakami, Yoshiaki Yasuda, Koichi Okamoto | 2013-10-22 |