Issued Patents All Time
Showing 26–50 of 55 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5526044 | Movement detection device and focus detection apparatus using such device | Jun Tokumitsu, Masayoshi Sekine, Toshiaki Kondo, Koji Takahashi, Isao Harigaya +1 more | 1996-06-11 |
| 5523844 | Displacement detection apparatus | Masanobu Hasegawa, Noriaki Ohguri, Masayoshi Sekine, Seiji Mishima | 1996-06-04 |
| 5519686 | Encoder for controlling measurements in the range of a few angstroms | Yoshihiro Yanagisawa, Yuko Morikawa, Hiroshi Matsuda, Haruki Kawada, Kunihiro Sakai +7 more | 1996-05-21 |
| 5486919 | Inspection method and apparatus for inspecting a particle, if any, on a substrate having a pattern | Toshihiko Tsuji, Seiji Takeuchi, Kyoichi Miyazaki, Noriyuki Nose, Tetsuzo Mori | 1996-01-23 |
| 5461474 | Inspection apparatus for detecting foreign matter on a surface to be inspected, and an exposure apparatus and a device manufacturing method using the same | Noriyuki Nose, Masayuki Suzuki, Kyoichi Miyazaki, Toshihiko Tsuji, Seiji Takeuchi | 1995-10-24 |
| 5450503 | Image recognition method | Yasuo Ogino, Mitsutoshi Ohwada, Yukichi Niwa | 1995-09-12 |
| 5448356 | Detecting device using a semiconductor light source emitting at least one laser beam in at least one predetermined direction | Hiroyasu Nose, Seiji Takeuchi | 1995-09-05 |
| 5432603 | Optical heterodyne interference measuring apparatus and method, and exposing apparatus and device manufacturing method using the same, in which a phase difference between beat signals is detected | Koichi Sentoku, Noriyuki Nose, Kenji Saito, Toshihiko Tsuji, Takahiro Matsumoto | 1995-07-11 |
| 5404220 | Measuring method and measuring apparatus for determining the relative displacement of a diffraction grating with respect to a plurality of beams | Seiji Takeuchi, Tetsuharu Nishimura, Hiroyasu Nose, Koh Ishizuka | 1995-04-04 |
| 5396336 | In-focus detecting device | Takeshi Baba, Yukichi Niwa | 1995-03-07 |
| 5369486 | Position detector for detecting the position of an object using a diffraction grating positioned at an angle | Takahiro Matsumoto, Noriyuki Nose, Kenji Saitoh, Masanobu Hasegawa, Koichi Sentoku | 1994-11-29 |
| 5343291 | Method and apparatus for measuring an interval between two objects | Mitsutoshi Ohwada, Masakazu Matsugu, Shigeyuki Suda, Yukichi Niwa, Noriyuki Nose +2 more | 1994-08-30 |
| 5340992 | Apparatus and method of detecting positional relationship using a weighted coefficient | Masakazu Matsugu, Naoto Abe | 1994-08-23 |
| 5333050 | Measuring method and apparatus for meausring the positional relationship of first and second gratings | Noriyuki Nose, Kenji Saitoh, Koichi Sentoku | 1994-07-26 |
| 5327221 | Device for detecting positional relationship between two objects | Kenji Saitoh, Masakazu Matsugu, Shigeyuki Suda, Yukichi Niwa, Ryo Kuroda +3 more | 1994-07-05 |
| 5325176 | Position detecting method and apparatus including Fraunhofer diffraction detector | Shigeyuki Suda, Kenji Saitoh, Masakazu Matsugu, Naoto Abe, Ryo Kuroda | 1994-06-28 |
| 5321502 | Measuring method and measuring apparatus | Takahiro Matsumoto, Kenji Saito, Hiroyasu Nose, Koichi Sentoku, Seiji Takeuchi | 1994-06-14 |
| 5319444 | Position detecting method and apparatus | Kenji Saitoh, Masakazu Matsugu, Yukichi Niwa, Noriyuki Nose, Shigeyuki Suda | 1994-06-07 |
| 5291023 | Position detecting system utilizing a weight coefficient to determine a gravity center of light | Masanobu Hasegawa, Naoto Abe | 1994-03-01 |
| 5276725 | Exposure system | Eigo Kawakami, Shunichi Uzawa | 1994-01-04 |
| 5200800 | Position detecting method and apparatus | Shigeyuki Suda, Kenji Saitoh, Noriyuki Nose | 1993-04-06 |
| 5192998 | In-focus detecting device | Jun Tokumitsu, Shigeyuki Suda, Masayoshi Sekine | 1993-03-09 |
| 5122660 | Distance measuring system utilizing an object with at least one inclined surface | Noriyuki Nose, Yukichi Niwa, Ryo Kuroda | 1992-06-16 |
| 5055665 | Focus detecting apparatus jointly employing outputs of plural diverse detectors | Takashi Baba, Yukichi Niwa, Takako Watanabe | 1991-10-08 |
| 5000572 | Distance measuring system | Noriyuki Nose, Yukichi Niwa, Ryo Kuroda | 1991-03-19 |