Issued Patents All Time
Showing 51–57 of 57 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5815396 | Vacuum processing device and film forming device and method using same | Hideaki Shimamura, Yuji Yoneoka, Shigeru Kobayashi, Satosi Kisimoto, Sunao Matsubara +6 more | 1998-09-29 |
| 5707500 | Vacuum processing equipment, film coating equipment and deposition method | Hideaki Shimamura, Yuji Yoneoka, Shigeru Kobayashi, Satosi Kisimoto, Sunao Matsubara +6 more | 1998-01-13 |
| 5670421 | Process for forming multilayer wiring | Susumu Tsuzuku, Shigeru Kobayashi, Osamu Kasahara, Hiroki Nezu, Masakazu Ishino +1 more | 1997-09-23 |
| 5574247 | CVD reactor apparatus | Susmu Tsuzuku, Natsuyo Chiba, Shigeru Kobayashi, Naoyuki Tamura, Norihiro Uchida | 1996-11-12 |
| 5498768 | Process for forming multilayer wiring | Susumu Tsuzuku, Shigeru Kobayashi, Osamu Kasahara, Hiroki Nezu, Masakazu Ishino +1 more | 1996-03-12 |
| 4979466 | Apparatus for selective deposition of metal thin film | — | 1990-12-25 |
| 4830891 | Method for selective deposition of metal thin film | Susumu Tsuzuku, Mitsuo Nakatani, Masaaki Maehara, Mitsuaki Horiuchi, Koichiro Mizukami | 1989-05-16 |