| 9960038 |
Processes to pattern small features for advanced patterning needs |
Carlton Ashley Washburn, Nickolas L. Brakensiek, Qin Lin, Yubao Wang, Vandana Krishnamurthy +1 more |
2018-05-01 |
| 9642258 |
All-organic inductor-capacitor tank circuit for radio frequency sensor applications |
Liyong Diao, Wu-Sheng Shih, Christopher Landorf |
2017-05-02 |
| 8877430 |
Methods of producing structures using a developer-soluble layer with multilayer technology |
Carlton Ashley Washburn, Brian Smith, Justin Lee Furse, Heping Wang |
2014-11-04 |
| 7998318 |
Crosslinkable fill compositions for uniformly protecting via and contact holes |
Xie Shao |
2011-08-16 |
| 7790231 |
Automated process and apparatus for planarization of topographical surfaces |
Jeremy McCutcheon |
2010-09-07 |
| 7455955 |
Planarization method for multi-layer lithography processing |
Wu-Sheng Shih, Juliet Ann Minzey Snook, Mark Daffron |
2008-11-25 |
| 7449230 |
Lithography pattern shrink process and articles |
Ram Sabnis |
2008-11-11 |
| 7122296 |
Lithography pattern shrink process and articles |
Ram Sabnis |
2006-10-17 |
| 7026237 |
Fill material for dual damascene processes |
Xie Shao |
2006-04-11 |
| 6893684 |
Anti-reflective coating compositions for use with low k dielectric materials |
Rama Puligadda, Tony D. Flaim |
2005-05-17 |
| 6716767 |
Contact planarization materials that generate no volatile byproducts or residue during curing |
Wu-Sheng Shih, Mark Daffron |
2004-04-06 |
| 6670425 |
Anti-reflective coating of polymer with epoxide rings reacted with light attenuating compound and unreacted epoxide rings |
Rama Puligadda, Tony D. Flaim, Runhui Huang, Xie Shao |
2003-12-30 |
| 6663916 |
Anti-reflective coating of polymer with epoxide rings reacted with light attenuating compound and unreacted epoxide rings |
Rama Puligadda, Tony D. Flaim, Runhui Huang, Xie Shao |
2003-12-16 |
| 6391472 |
Fill material for dual damascene processes |
Xie Shao |
2002-05-21 |
| 5578676 |
Method for making polymers with intrinsic light-absorbing properties |
Tony D. Flaim, Kimberly A. Moeckli, Terry Brewer |
1996-11-26 |
| 5401613 |
Method of manufacturing microelectronic devices having multifunctional photolithographic layers |
Terry Brewer, J. Michael Mori |
1995-03-28 |
| 5368989 |
Photolithographic article utilizing polymers with light-absorbing properties for anti-reflective coating |
Tony D. Flaim, Kimberly A. Moeckli, Terry Brewer |
1994-11-29 |
| 5362608 |
Microlithographic substrate cleaning and compositions therefor |
Tony D. Flaim, Terry Brewer |
1994-11-08 |
| 5281690 |
Base-soluble polyimide release layers for use in microlithographic processing |
Tony D. Flaim, Gregg Barnes, Terry Brewer |
1994-01-25 |
| 5234990 |
Polymers with intrinsic light-absorbing properties for anti-reflective coating applications in deep ultraviolet microlithography |
Tony D. Flaim, Kimberly A. Moeckli, Terry Brewer |
1993-08-10 |
| 5140666 |
Heating apparatus for expanding a cylindrical wall using heated air |
— |
1992-08-18 |
| 5110697 |
Multifunctional photolithographic compositions |
Terry Brewer, J. Michael Mori |
1992-05-05 |
| 5057399 |
Method for making polyimide microlithographic compositions soluble in alkaline media |
Tony D. Flaim, Gregg Barnes, Terry Brewer |
1991-10-15 |
| 4876165 |
Light filters for microelectronics |
Terry Brewer, Dan W. Hawley, William J. Latham, Lynn K. Stichnote |
1989-10-24 |