Issued Patents All Time
Showing 1–24 of 24 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9960038 | Processes to pattern small features for advanced patterning needs | Carlton Ashley Washburn, Nickolas L. Brakensiek, Qin Lin, Yubao Wang, Vandana Krishnamurthy +1 more | 2018-05-01 |
| 9642258 | All-organic inductor-capacitor tank circuit for radio frequency sensor applications | Liyong Diao, Wu-Sheng Shih, Christopher Landorf | 2017-05-02 |
| 8877430 | Methods of producing structures using a developer-soluble layer with multilayer technology | Carlton Ashley Washburn, Brian Smith, Justin Lee Furse, Heping Wang | 2014-11-04 |
| 7998318 | Crosslinkable fill compositions for uniformly protecting via and contact holes | Xie Shao | 2011-08-16 |
| 7790231 | Automated process and apparatus for planarization of topographical surfaces | Jeremy McCutcheon | 2010-09-07 |
| 7455955 | Planarization method for multi-layer lithography processing | Wu-Sheng Shih, Juliet Ann Minzey Snook, Mark Daffron | 2008-11-25 |
| 7449230 | Lithography pattern shrink process and articles | Ram Sabnis | 2008-11-11 |
| 7122296 | Lithography pattern shrink process and articles | Ram Sabnis | 2006-10-17 |
| 7026237 | Fill material for dual damascene processes | Xie Shao | 2006-04-11 |
| 6893684 | Anti-reflective coating compositions for use with low k dielectric materials | Rama Puligadda, Tony D. Flaim | 2005-05-17 |
| 6716767 | Contact planarization materials that generate no volatile byproducts or residue during curing | Wu-Sheng Shih, Mark Daffron | 2004-04-06 |
| 6670425 | Anti-reflective coating of polymer with epoxide rings reacted with light attenuating compound and unreacted epoxide rings | Rama Puligadda, Tony D. Flaim, Runhui Huang, Xie Shao | 2003-12-30 |
| 6663916 | Anti-reflective coating of polymer with epoxide rings reacted with light attenuating compound and unreacted epoxide rings | Rama Puligadda, Tony D. Flaim, Runhui Huang, Xie Shao | 2003-12-16 |
| 6391472 | Fill material for dual damascene processes | Xie Shao | 2002-05-21 |
| 5578676 | Method for making polymers with intrinsic light-absorbing properties | Tony D. Flaim, Kimberly A. Moeckli, Terry Brewer | 1996-11-26 |
| 5401613 | Method of manufacturing microelectronic devices having multifunctional photolithographic layers | Terry Brewer, J. Michael Mori | 1995-03-28 |
| 5368989 | Photolithographic article utilizing polymers with light-absorbing properties for anti-reflective coating | Tony D. Flaim, Kimberly A. Moeckli, Terry Brewer | 1994-11-29 |
| 5362608 | Microlithographic substrate cleaning and compositions therefor | Tony D. Flaim, Terry Brewer | 1994-11-08 |
| 5281690 | Base-soluble polyimide release layers for use in microlithographic processing | Tony D. Flaim, Gregg Barnes, Terry Brewer | 1994-01-25 |
| 5234990 | Polymers with intrinsic light-absorbing properties for anti-reflective coating applications in deep ultraviolet microlithography | Tony D. Flaim, Kimberly A. Moeckli, Terry Brewer | 1993-08-10 |
| 5140666 | Heating apparatus for expanding a cylindrical wall using heated air | — | 1992-08-18 |
| 5110697 | Multifunctional photolithographic compositions | Terry Brewer, J. Michael Mori | 1992-05-05 |
| 5057399 | Method for making polyimide microlithographic compositions soluble in alkaline media | Tony D. Flaim, Gregg Barnes, Terry Brewer | 1991-10-15 |
| 4876165 | Light filters for microelectronics | Terry Brewer, Dan W. Hawley, William J. Latham, Lynn K. Stichnote | 1989-10-24 |