VK

Vandana Krishnamurthy

BS Brewer Science: 15 patents #7 of 171Top 5%
Overall (All Time): #312,098 of 4,157,543Top 8%
15
Patents All Time

Issued Patents All Time

Patent #TitleCo-InventorsDate
11972948 Adhesion layers for EUV lithography Andrea M. Chacko, Yichen Liang, Hao-Chun Lee, Stephen Grannemann, Douglas J. Guerrero 2024-04-30
11817317 High-silicon-content wet-removable planarizing layer Ming Luo, Yubao Wang, Kaumba Sakavuyi 2023-11-14
RE46841 Spin-on carbon compositions for lithographic processing Daniel M. Sullivan, Yubao Wang, Qin Lin, Sean Bracken Simmons 2018-05-15
9960038 Processes to pattern small features for advanced patterning needs Carlton Ashley Washburn, James E. Lamb, III, Nickolas L. Brakensiek, Qin Lin, Yubao Wang +1 more 2018-05-01
9249013 Silicon hardmask layer for directed self-assembly Yubao Wang, Mary Ann Hockey, Douglas J. Guerrero, Robert Christian Cox 2016-02-02
9102129 Spin-on carbon compositions for lithographic processing Daniel M. Sullivan, Yubao Wang, Qin Lin, Sean Bracken Simmons 2015-08-11
8968989 Assist layers for EUV lithography Tantiboro Ouattara, Carlton Ashley Washburn, Douglas J. Guerrero, Aline Collin 2015-03-03
8895230 Spin-on carbon compositions for lithographic processing Daniel M. Sullivan, Yubao Wang, Qin Lin, Sean Bracken Simmons 2014-11-25
8257910 Underlayers for EUV lithography Douglas J. Guerrero, Hao Xu 2012-09-04
6962769 Anti-reflective coating composition with improved spin bowl compatibility Xie Shao, Jim D. Meador, Mandar Bhave, Kelly A. Nowak, Michelle Fowler +1 more 2005-11-08
6872506 Wet-developable anti-reflective compositions Charles J. Neef 2005-03-29
6740469 Developer-soluble metal alkoxide coatings for microelectronic applications Charles J. Neef, Juliet A. M. Snook 2004-05-25
5919599 Thermosetting anti-reflective coatings at deep ultraviolet Jim D. Meador, Douglas J. Guerrero, Xie Shao 1999-07-06
5892096 Non-subliming mid-UV dyes and ultra-thin organic arcs having differential solubility Jim D. Meador, Xie Shao, Earnest C. Murphy, Tony D. Flaim, Terry Brewer 1999-04-06
5688987 Non-subliming Mid-UV dyes and ultra-thin organic arcs having differential solubility Jim D. Meador, Xie Shao, Earnest C. Murphy, Tony D. Flaim, Terry Brewer 1997-11-18