Issued Patents All Time
Showing 1–15 of 15 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9638999 | Dual-layer light-sensitive developer-soluble bottom anti-reflective coatings for 193-nm lithography | Douglas J. Guerrero, Ramil Marcelo L. Mercado | 2017-05-02 |
| 8383318 | Acid-sensitive, developer-soluble bottom anti-reflective coatings | Joyce A. Lowes, Ramil Marcelo L. Mercado | 2013-02-26 |
| 8206893 | Photoimageable branched polymer | Hao Xu, Ramil Marcelo L. Mercado, Douglas J. Guerrero | 2012-06-26 |
| 7507783 | Thermally curable middle layer comprising polyhedral oligomeric silsesouioxanes for 193-nm trilayer resist process | Mariya Nagatkina, Doug Holmes | 2009-03-24 |
| 6962769 | Anti-reflective coating composition with improved spin bowl compatibility | Xie Shao, Mandar Bhave, Vandana Krishnamurthy, Kelly A. Nowak, Michelle Fowler +1 more | 2005-11-08 |
| 6316160 | Fast-etching, thermosetting anti-reflective coatings derived from cellulosic binders | Xie Shao, Terry Brewer | 2001-11-13 |
| 6156479 | Thermosetting anti-refective coatings | Kelly A. Nowak, Gu Xu | 2000-12-05 |
| 5919598 | Method for making multilayer resist structures with thermosetting anti-reflective coatings | Tony D. Flaim, Xie Shao, Terry Brewer | 1999-07-06 |
| 5919599 | Thermosetting anti-reflective coatings at deep ultraviolet | Douglas J. Guerrero, Xie Shao, Vandana Krishnamurthy | 1999-07-06 |
| 5892096 | Non-subliming mid-UV dyes and ultra-thin organic arcs having differential solubility | Xie Shao, Vandana Krishnamurthy, Earnest C. Murphy, Tony D. Flaim, Terry Brewer | 1999-04-06 |
| 5693691 | Thermosetting anti-reflective coatings compositions | Tony D. Flaim, Xie Shao, Terry Brewer | 1997-12-02 |
| 5688987 | Non-subliming Mid-UV dyes and ultra-thin organic arcs having differential solubility | Xie Shao, Vandana Krishnamurthy, Earnest C. Murphy, Tony D. Flaim, Terry Brewer | 1997-11-18 |
| 4272604 | Base plate and lithographic plate prepared by sensitization thereof | Edward H. Parker | 1981-06-09 |
| 4272605 | Base plate and lithographic plate prepared by sensitization thereof | Edward H. Parker | 1981-06-09 |
| 4198470 | Base plate and lithographic plate prepared by sensitization thereof | Edward H. Parker | 1980-04-15 |