Issued Patents All Time
Showing 1–24 of 24 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11154073 | Temperature control system and method TDSF plus | Kenneth W. Cowans, Glenn Zubillaga | 2021-10-26 |
| 10386101 | Method and apparatus for thermal exchange with two-phase media | Kenneth W. Cowans, Glenn Zubillaga | 2019-08-20 |
| 10342241 | Temperature control system and method TDSF plus | Kenneth W. Cowans, Glenn Zubillaga | 2019-07-09 |
| 9372020 | Method and apparatus for thermal exchange with two-phase media | Kenneth W. Cowans, Glenn Zubillaga | 2016-06-21 |
| 9360243 | Temperature control system and method TDSF plus | Kenneth W. Cowans, Glenn Zubillaga | 2016-06-07 |
| 8980044 | Plasma reactor with a multiple zone thermal control feed forward control apparatus | Paul Brillhart, Richard Fovell, Hamid Tavassoli, Douglas A. Buchberger, Jr., Douglas H. Burns +5 more | 2015-03-17 |
| 8801893 | Method of cooling a wafer support at a uniform temperature in a capacitively coupled plasma reactor | Paul Brillhart, Richard Fovell, Douglas A. Buchberger, Jr., Douglas H. Burns, Kallol Bera +4 more | 2014-08-12 |
| 8689575 | Thermal control system and method | Glenn Zubillaga, Kenneth W. Cowans | 2014-04-08 |
| 8546267 | Method of processing a workpiece in a plasma reactor using multiple zone feed forward thermal control | Paul Brillhart, Richard Fovell, Douglas A. Buchberger, Jr., Douglas H. Burns, Kallol Bera +4 more | 2013-10-01 |
| 8532832 | Method and apparatus for thermal exchange with two-phase media | Kenneth W. Cowans, Glenn Zubillaga | 2013-09-10 |
| 8453468 | System and method for thermal control of different heat loads from a single source of saturated fluids | Kenneth W. Cowans, Glenn Zubillaga | 2013-06-04 |
| 8337660 | Capacitively coupled plasma reactor having very agile wafer temperature control | Douglas A. Buchberger, Jr., Paul Brillhart, Richard Fovell, Hamid Tavassoli, Douglas H. Burns +5 more | 2012-12-25 |
| 8329586 | Method of processing a workpiece in a plasma reactor using feed forward thermal control | Douglas A. Buchberger, Jr., Paul Brillhart, Richard Fovell, Douglas H. Burns, Kallol Bera +4 more | 2012-12-11 |
| 8291719 | Thermal control system and method | Glenn Zubillaga, Kenneth W. Cowans | 2012-10-23 |
| 8240160 | Thermal control system and method | Kenneth W. Cowans, Matthew Antoniou, Glenn Zubillaga | 2012-08-14 |
| 8221580 | Plasma reactor with wafer backside thermal loop, two-phase internal pedestal thermal loop and a control processor governing both loops | Douglas A. Buchberger, Jr., Paul Brillhart, Richard Fovell, Hamid Tavassoli, Douglas H. Burns +5 more | 2012-07-17 |
| 8092639 | Plasma reactor with feed forward thermal control system using a thermal model for accommodating RF power changes or wafer temperature changes | Douglas A. Buchberger, Jr., Paul Brillhart, Richard Fovell, Hamid Tavassoli, Douglas H. Burns +5 more | 2012-01-10 |
| 7988872 | Method of operating a capacitively coupled plasma reactor with dual temperature control loops | Paul Brillhart, Richard Fovell, Douglas A. Buchberger, Jr., Douglas H. Burns, Kallol Bera +4 more | 2011-08-02 |
| 7765820 | Thermal control system and method | Kenneth W. Cowans, Glenn Zubillaga, Isaac Millan | 2010-08-03 |
| 7661460 | Heat exchangers for fluid media | Kenneth W. Cowans | 2010-02-16 |
| 7415835 | Thermal control system and method | Kenneth W. Cowans, Glenn Zubillaga, Isaac Millan | 2008-08-26 |
| 7243500 | Heat exchanger and temperature control unit | Kenneth W. Cowans, Glenn Zubillaga | 2007-07-17 |
| 7178353 | Thermal control system and method | Kenneth W. Cowans, Glenn Zubillaga, Isaac Millan | 2007-02-20 |
| 6446446 | Efficient cooling system and method | — | 2002-09-10 |