IM

Isaac Millan

BA B/E Aerospace: 6 patents #108 of 810Top 15%
AS Advanced Thermal Sciences: 5 patents #10 of 15Top 70%
Applied Materials: 4 patents #2,506 of 7,310Top 35%
Overall (All Time): #463,166 of 4,157,543Top 15%
11
Patents All Time

Issued Patents All Time

Patent #TitleCo-InventorsDate
8980044 Plasma reactor with a multiple zone thermal control feed forward control apparatus Paul Brillhart, Richard Fovell, Hamid Tavassoli, Douglas A. Buchberger, Jr., Douglas H. Burns +5 more 2015-03-17
8801893 Method of cooling a wafer support at a uniform temperature in a capacitively coupled plasma reactor Paul Brillhart, Richard Fovell, Douglas A. Buchberger, Jr., Douglas H. Burns, Kallol Bera +4 more 2014-08-12
8546267 Method of processing a workpiece in a plasma reactor using multiple zone feed forward thermal control Paul Brillhart, Richard Fovell, Douglas A. Buchberger, Jr., Douglas H. Burns, Kallol Bera +4 more 2013-10-01
8337660 Capacitively coupled plasma reactor having very agile wafer temperature control Douglas A. Buchberger, Jr., Paul Brillhart, Richard Fovell, Hamid Tavassoli, Douglas H. Burns +5 more 2012-12-25
8329586 Method of processing a workpiece in a plasma reactor using feed forward thermal control Douglas A. Buchberger, Jr., Paul Brillhart, Richard Fovell, Douglas H. Burns, Kallol Bera +4 more 2012-12-11
8221580 Plasma reactor with wafer backside thermal loop, two-phase internal pedestal thermal loop and a control processor governing both loops Douglas A. Buchberger, Jr., Paul Brillhart, Richard Fovell, Hamid Tavassoli, Douglas H. Burns +5 more 2012-07-17
8092639 Plasma reactor with feed forward thermal control system using a thermal model for accommodating RF power changes or wafer temperature changes Douglas A. Buchberger, Jr., Paul Brillhart, Richard Fovell, Hamid Tavassoli, Douglas H. Burns +5 more 2012-01-10
7988872 Method of operating a capacitively coupled plasma reactor with dual temperature control loops Paul Brillhart, Richard Fovell, Douglas A. Buchberger, Jr., Douglas H. Burns, Kallol Bera +4 more 2011-08-02
7765820 Thermal control system and method Kenneth W. Cowans, William W. Cowans, Glenn Zubillaga 2010-08-03
7415835 Thermal control system and method Kenneth W. Cowans, William W. Cowans, Glenn Zubillaga 2008-08-26
7178353 Thermal control system and method Kenneth W. Cowans, William W. Cowans, Glenn Zubillaga 2007-02-20