| 9761493 |
Thin epitaxial silicon carbide wafer fabrication |
— |
2017-09-12 |
| 8299485 |
Substrates for monolithic optical circuits and electronic circuits |
— |
2012-10-30 |
| 8148242 |
Oxidation after oxide dissolution |
Oleg Kononchuk |
2012-04-03 |
| 7968911 |
Relaxation of a strained layer using a molten layer |
— |
2011-06-28 |
| 7956436 |
Method of forming a device wafer with recyclable support |
— |
2011-06-07 |
| 7605055 |
Wafer with diamond layer |
— |
2009-10-20 |
| 7605054 |
Method of forming a device wafer with recyclable support |
— |
2009-10-20 |
| 7585792 |
Relaxation of a strained layer using a molten layer |
— |
2009-09-08 |
| 6388290 |
Single crystal silicon on polycrystalline silicon integrated circuits |
Yves Chabal |
2002-05-14 |
| 5656399 |
Process for making an x-ray mask |
Joseph A. Abate, Jerry Vhi-Yi Guo |
1997-08-12 |
| 5482802 |
Material removal with focused particle beams |
Lloyd R. Harriott, Ratnaji R. Kola |
1996-01-09 |
| 5051326 |
X-Ray lithography mask and devices made therewith |
Lee E. Trimble |
1991-09-24 |
| 4835113 |
Fabrication of dielectrically isolated devices with buried conductive layers |
Lee E. Trimble |
1989-05-30 |
| 4676841 |
Fabrication of dielectrically isolated devices utilizing buried oxygen implant and subsequent heat treatment at temperatures above 1300.degree. C . |
— |
1987-06-30 |
| 4581814 |
Process for fabricating dielectrically isolated devices utilizing heating of the polycrystalline support layer to prevent substrate deformation |
Pradip K. Roy, Donald G. Schimmel, Lee E. Trimble |
1986-04-15 |
| 4497683 |
Process for producing dielectrically isolated silicon devices |
McDonald Robinson |
1985-02-05 |
| 4494303 |
Method of making dielectrically isolated silicon devices |
David Lischner, McDonald Robinson |
1985-01-22 |
| 4461670 |
Process for producing silicon devices |
David Lischner, McDonald Robinson |
1984-07-24 |
| 4406709 |
Method of increasing the grain size of polycrystalline materials by directed energy-beams |
Harry J. Leamy, Lee E. Trimble |
1983-09-27 |
| 4258078 |
Metallization for integrated circuits |
Thomas E. Seidel |
1981-03-24 |
| 4249962 |
Method of removing contaminating impurities from device areas in a semiconductor wafer |
— |
1981-02-10 |
| 4240843 |
Forming self-guarded p-n junctions by epitaxial regrowth of amorphous regions using selective radiation annealing |
Gabriel L. Miller |
1980-12-23 |
| 4234358 |
Patterned epitaxial regrowth using overlapping pulsed irradiation |
Lionel C. Kimerling, Harry J. Leamy, John M. Poate, George Arthur Rozgonyi |
1980-11-18 |