| 9011978 |
Method and apparatus for treatment of self-assemblable polymer layers for use in lithography |
Roelof Koole, Vadim Yevgenyevich Banine, Emiel Peeters |
2015-04-21 |
| 8967991 |
Imprint lithography template |
Yvonne Wendela Kruijt-Stegeman |
2015-03-03 |
| 8961801 |
Imprint lithography method and apparatus |
Vadim Yevgenyevich Banine, Johan Frederik Dijksman, Yvonne Wendela Kruijt-Stegeman, Jeroen Herman Lammers, Roelof Koole |
2015-02-24 |
| 8956804 |
Self-assemblable polymer and methods for use in lithography |
Aurelie Marie Andree Brizard, Roelof Koole, Emiel Peeters |
2015-02-17 |
| 8921032 |
Self-assemblable polymer and method for use in lithography |
Emiel Peeters, Roelof Koole |
2014-12-30 |
| 8889055 |
Imprint lithography method |
Arie Jeffrey Den Boef |
2014-11-18 |
| 8845320 |
Imprint lithography apparatus |
Catharinus De Schiffart, Andre Bernardus Jeunink, Johannes Petrus Martinus Bernardus Vermeulen, Yvonne Wendela Kruijt-Stegeman, Norbert Erwin Therenzo Jansen |
2014-09-30 |
| 8828253 |
Lithography using self-assembled polymers |
Roelof Koole, Johan Frederik Dijksman, Emiel Peeters |
2014-09-09 |
| 8830455 |
Inspection method and apparatus |
Arie Jeffrey Den Boef, Vadim Yevgenyevich Banine, Luigi Scaccabarozzi |
2014-09-09 |
| 8822139 |
Method for providing an ordered layer of self-assemblable polymer for use in lithography |
Emiel Peeters, Roelof Koole |
2014-09-02 |
| 8753557 |
Imprint lithography |
Yvonne Wendela Kruijt-Stegeman, Johan Frederik Dijksman, Aleksey Yurievich Kolesnychenko, Karel Diederick Van Der Mast, Klaus Simon +2 more |
2014-06-17 |
| 8743361 |
Imprint lithography method and apparatus |
Johan Frederik Dijksman, Arie Jeffrey Den Boef, Martinus Bernardus Van Der Mark |
2014-06-03 |
| 8707890 |
Imprint lithography |
Ivar Schram, Johan Frederik Dijksman, Yvonne Wendela Kruijt-Stegeman, Jeroen Herman Lammers |
2014-04-29 |
| 8696969 |
Imprint lithography method and apparatus |
Johan Frederik Dijksman, Yvonne Wendela Kruijt-Stegeman, Jeroen Herman Lammers, Leendert Van Der Tempel |
2014-04-15 |
| 8691124 |
Alignment and imprint lithography |
Yvonne Wendela Kruijt-Stegeman |
2014-04-08 |
| 8579625 |
Imprint lithography |
Yvonne Wendela Kruijt-Stegeman, Raymond Jacobus Wilhelmus Knaapen, Johan Frederik Dijksman, Ivar Schram, Raymond Wilhelmus Louis Lafarre |
2013-11-12 |
| 8529823 |
Imprint lithography |
Arie Jeffrey Den Boef, Vadim Yevgenyevich Banine, Andre Bernardus Jeunink, Yvonne Wendela Kruijt-Stegeman |
2013-09-10 |
| 8524136 |
Imprint lithography |
Yvonne Wendela Kruijt-Stegeman, Ivar Schram, Jeroen Herman Lammers |
2013-09-03 |
| 8486485 |
Method of dispensing imprintable medium |
Johan Frederik Dijksman, Anke Pierik, Martin Maurice Vernhout, Yvonne Wendela Kruijt-Stegeman, Ivar Schram |
2013-07-16 |
| 8485123 |
Imprint lithography |
Johan Frederik Dijksman, Antonius Johannes Joseph Wismans, Anke Pierik, Martin Maurice Vernhout, Yvonne Wendela Kruijt-Stegeman |
2013-07-16 |
| 8454849 |
Imprint lithography |
Vadim Yevgenyevich Banine, Arie Jeffrey Den Boef, Yvonne Wendela Kruijt-Stegeman, Tatyana Viktorovna Rakhimova, Dmitriy Viktorovich Lopaev +3 more |
2013-06-04 |
| 8404170 |
Imprint lithography apparatus and method |
Roelof Koole |
2013-03-26 |
| 8357536 |
Inspection method and apparatus |
— |
2013-01-22 |
| 8329052 |
Imprint lithography |
Johan Frederik Dijksman, Yvonne Wendela Kruijt-Stegeman, Ivar Schram |
2012-12-11 |
| 8323541 |
Imprint lithography |
Ivar Schram, Johan Frederik Dijksman, Yvonne Wendela Kruijt-Stegeman, Jeroen Herman Lammers, Richard Joseph Marinus Schroeders |
2012-12-04 |
