| 9740110 |
Support table for a lithographic apparatus, lithographic apparatus and device manufacturing method |
Martijn Houben, Thibault Simon Mathieu Laurent, Hendrikus Johannes Marinus Van Abeelen, Armand Rosa Jozef Dassen, Sander Catharina Reinier Derks |
2017-08-22 |
| 9632435 |
Lithographic apparatus and method |
Nicolaas Ten Kate, Johannes Henricus Wilhelmus Jacobs, Joost Jeroen Ottens, Bastiaan Andreas Wilhelmus Hubertus Knarren, Thibault Simon Mathieu Laurent +3 more |
2017-04-25 |
| 9618858 |
Lithographic apparatus and a device manufacturing method involving thermal conditioning of a table |
Hrishikesh Patel, Johannes Henricus Wilhelmus Jacobs, Gerardus Adrianus Antonius Maria Kusters, Thibault Simon Mathieu Laurent, Marcio Alexandre Cano Miranda +2 more |
2017-04-11 |
| 9575419 |
Support table for a lithographic apparatus, lithographic apparatus and device manufacturing method |
Martijn Houben, Thibault Simon Mathieu Laurent, Hendrikus Johannes Marinus Van Abeelen, Armand Rosa Jozef Dassen, Sander Catharina Reinier Derks |
2017-02-21 |
| 9298107 |
Lithographic apparatus and method |
Thibault Simon Mathieu Laurent, Gerardus Adrianus Antonius Maria Kusters, Bastiaan Andreas Wilhelmus Hubertus Knarren, Raymond Wilhelmus Louis Lafarre, Koen Steffens +5 more |
2016-03-29 |
| 9280063 |
Substrate table assembly, an immersion lithographic apparatus and a device manufacturing method |
Sjoerd Nicolaas Lambertus Donders, Johannes Henricus Wilhelmus Jacobs, Martijn Houben, Thibault Simon Mathieu Laurent, Frank Johannes Jacobus Van Boxtel +1 more |
2016-03-08 |
| 9141005 |
Temperature sensing probe, burl plate, lithographic apparatus and method |
Thibault Simon Mathieu Laurent, Gerardus Adrianus Antonius Maria Kusters, Sander Catharina Reinier Derks |
2015-09-22 |
| 8970822 |
Support table for a lithographic apparatus, lithographic apparatus and device manufacturing method |
Martijn Houben, Thibault Simon Mathieu Laurent, Hendrikus Johannes Marinus Van Abeelen, Armand Rosa Jozef Dassen, Sander Catharina Reinier Derks |
2015-03-03 |