Issued Patents All Time
Showing 26–41 of 41 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7211810 | Method for the protection of an optical element, lithographic apparatus, and device manufacturing method | Levinus Pieter Bakker | 2007-05-01 |
| 7193229 | Lithographic apparatus, illumination system and method for mitigating debris particles | Vadim Yevgenyevich Banine, Levinus Pieter Bakker, Aleksey Yurievich Kolesnychenko, Johannes Hubertus Josephina Moors | 2007-03-20 |
| 7167232 | Lithographic apparatus and radiation source comprising a debris-mitigation system and method for mitigating debris particles in a lithographic apparatus | Vadim Yevgenyevich Banine, Johannes Peterus Henricus De Kuster, Johannes Hubertus Josephina Moors, Lucas Henricus Johannes Stevens | 2007-01-23 |
| 7105837 | Lithographic apparatus, device manufacturing method and radiation system | Ralph Kurt, Levinus Pieter Bakker, Jan Evert Van Der Werf | 2006-09-12 |
| 7088424 | Lithographic projection apparatus, reflector assembly for use therein, and device manufacturing method | Levinus Pieter Bakker, Jeroen Jonkers, Hugo Matthieu Visser | 2006-08-08 |
| 7057190 | Lithographic projection apparatus, particle barrier for use therein, integrated structure manufacturing method, and device manufactured thereby | Levinus Pieter Bakker, Vadim Yevgenyevich Banine | 2006-06-06 |
| 7034308 | Radiation system, contamination barrier, lithographic apparatus, device manufacturing method and device manufactured thereby | Levinus Pieter Bakker, Vadim Yevgenyevich Banine, Ralph Kurt, Yurii Victorovitch Sidelnikov | 2006-04-25 |
| 6906788 | Lithographic projection apparatus with multiple suppression meshes | Levinus Pieter Bakker | 2005-06-14 |
| 6859259 | Lithographic projection apparatus and reflector assembly for use therein | Levinus Pieter Bakker, Jeroen Jonkers, Hugo Matthieu Visser | 2005-02-22 |
| 6838684 | Lithographic projection apparatus and particle barrier for use therein | Levinus Pieter Bakker, Vadim Yevgenyevich Banine | 2005-01-04 |
| 6791665 | Lithographic projection apparatus and device manufacturing method | Ralph Kurt, Levinus Pieter Bakker | 2004-09-14 |
| 6783269 | Side-emitting rod for use with an LED-based light engine | Michael D. Pashley, Thomas Marshall | 2004-08-31 |
| 6753661 | LED-based white-light backlighting for electronic displays | Subramanian Muthu, Chin Chang, James M. Gaines | 2004-06-22 |
| 6741351 | LED luminaire with light sensor configurations for optical feedback | Thomas Marshall, Michael D. Pashley | 2004-05-25 |
| 6630801 | Method and apparatus for sensing the color point of an RGB LED white luminary using photodiodes | — | 2003-10-07 |
| 6596977 | Average light sensing for PWM control of RGB LED based white light luminaries | Subramanian Muthu | 2003-07-22 |