| 8730450 |
Immersion photolithography system and method using microchannel nozzles |
Herman Vogel, Klaus Simon |
2014-05-20 |
| 8724083 |
Lithographic apparatus and device manufacturing method |
Bob Streefkerk, Johannes Jacobus Matheus Baselmans, Henrikus Herman Marie Cox, Sjoerd Nicolaas Lambertus Donders, Christiaan Alexander Hoogendam +11 more |
2014-05-13 |
| 8724084 |
Lithographic apparatus and device manufacturing method |
Bob Streefkerk, Johannes Jacobus Matheus Baselmans, Henrikus Herman Marie Cox, Sjoerd Nicolaas Lambertus Donders, Christiaan Alexander Hoogendam +11 more |
2014-05-13 |
| 8711323 |
Lithographic apparatus and device manufacturing method |
Bob Streefkerk, Joeri Lof, Klaus Simon, Alexander Straaijer |
2014-04-29 |
| 8670105 |
Immersion photolithography system and method using microchannel nozzles |
Herman Vogel, Klaus Simon |
2014-03-11 |
| 8446568 |
Lithographic apparatus and device manufacturing method |
Sjoerd Nicolaas Lambertus Donders, Christiaan Alexander Hoogendam, Joeri Lof, Erik Roelof Loopstra, Johannes Catharinus Hubertus Mulkens +4 more |
2013-05-21 |
| 8208120 |
Lithographic apparatus and device manufacturing method |
Joeri Lof, Christiaan Alexander Hoogendam, Aleksey Yurievich Kolesnychenko, Erik Roelof Loopstra, Theodorus Marinus Modderman +8 more |
2012-06-26 |
| 8194242 |
Substrate distortion measurement |
Pieter Willem Herman De Jager, Erik Marie Jose Smeets |
2012-06-05 |
| 8004649 |
Immersion photolithography system and method using microchannel nozzles |
Herman Vogel, Klaus Simon |
2011-08-23 |
| 7982850 |
Immersion lithographic apparatus and device manufacturing method with gas supply |
Joeri Lof, Christiaan Alexander Hoogendam, Aleksey Yurievich Kolesnychenko, Erik Roelof Loopstra, Theodorus Marinus Modderman +7 more |
2011-07-19 |
| 7936447 |
Lithographic apparatus and device manufacturing method |
Erik Marie Jose Smeets, David Christopher Ockwell, Henricus Jozef Peter Lenders |
2011-05-03 |
| 7936444 |
Lithographic apparatus and device manufacturing method |
Bob Streefkerk, Johannes Jacobus Matheus Baselmans, Henrikus Herman Marie Cox, Sjoerd Nicolaas Lambertus Donders, Christiaan Alexander Hoogendam +11 more |
2011-05-03 |
| 7932999 |
Lithographic apparatus and device manufacturing method |
Christiaan Alexander Hoogendam, Sjoerd Nicolaas Lambertus Donders, Joeri Lof, Erik Roelof Loopstra, Johannes Catharinus Hubertus Mulkens +4 more |
2011-04-26 |
| 7738074 |
Lithographic apparatus and device manufacturing method |
Bob Streefkerk, Joeri Lof, Klaus Simon, Alexander Straaijer |
2010-06-15 |
| 7411650 |
Immersion photolithography system and method using microchannel nozzles |
Herman Vogel, Klaus Simon |
2008-08-12 |
| 7388648 |
Lithographic projection apparatus |
Joeri Lof, Christiaan Alexander Hoogendam, Aleksey Yurievich Kolesnychenko, Erik Roelof Loopstra, Theodorus Marinus Modderman +7 more |
2008-06-17 |
| 7372541 |
Lithographic apparatus and device manufacturing method |
Joeri Lof, Christiaan Alexander Hoogendam, Aleksey Yurievich Kolesnychenko, Erik Roelof Loopstra, Theodorus Marinus Modderman +8 more |
2008-05-13 |
| 7352434 |
Lithographic apparatus and device manufacturing method |
Bob Streefkerk, Levinus Pieter Bakker, Johannes Jacobus Matheus Baselmans, Henrikus Herman Marie Cox, Sjoerd Nicolaas Lambertus Donders +12 more |
2008-04-01 |
| 7224436 |
Lithographic apparatus and device manufacturing method |
Sjoerd Nicolaas Lambertus Donders, Christiaan Alexander Hoogendam, Joeri Lof, Erik Roelof Loopstra, Jeroen Johannes Sophia Maria Mertens +4 more |
2007-05-29 |
| 7170584 |
Lithographic apparatus and device manufacturing method |
— |
2007-01-30 |
| 7110081 |
Lithographic apparatus and device manufacturing method |
Christian Alexander Hoogendam, Sjoerd Nicolaas Lambertus Donders, Hans Jansen, Jacobus Johannus Leonardus Hendricus Verspay, Joeri Lof +4 more |
2006-09-19 |
| 7075616 |
Lithographic apparatus and device manufacturing method |
Sjoerd Nicolaas Lambertus Donders, Christiaan Alexander Hoogendam, Joeri Lof, Erik Roelof Loopstra, Jeroen Johannes Sophia Maria Mertens +4 more |
2006-07-11 |
| 7038760 |
Lithographic apparatus and device manufacturing method |
Johannes Catharinus Hubertus Mulkens, Joeri Lof, Klaus Simon, Alexander Straaijer, Bob Streefkerk |
2006-05-02 |
| 6952253 |
Lithographic apparatus and device manufacturing method |
Joeri Lof, Christiaan Alexander Hoogendam, Aleksey Yurievich Kolesnychenko, Erik Roelof Loopstra, Theodorus Marinus Modderman +7 more |
2005-10-04 |
| 6867844 |
Immersion photolithography system and method using microchannel nozzles |
Herman Vogel, Klaus Simon |
2005-03-15 |