Issued Patents All Time
Showing 26–33 of 33 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9406523 | Highly selective doped oxide removal method | Zhijun Chen, Nitin K. Ingle, Anchuan Wang, Shankar Venkataraman | 2016-08-02 |
| 9209012 | Selective etch of silicon nitride | Zhijun Chen, Anchuan Wang, Nitin K. Ingle, Shankar Venkataraman | 2015-12-08 |
| 9184055 | Processing systems and methods for halide scavenging | Anchuan Wang, Xinglong Chen, Hiroshi Hamana, Zhijun Chen, Ching-Mei Hsu +5 more | 2015-11-10 |
| 9153442 | Processing systems and methods for halide scavenging | Anchuan Wang, Xinglong Chen, Hiroshi Hamana, Zhijun Chen, Ching-Mei Hsu +5 more | 2015-10-06 |
| 9093371 | Processing systems and methods for halide scavenging | Anchuan Wang, Xinglong Chen, Hiroshi Hamana, Zhijun Chen, Ching-Mei Hsu +5 more | 2015-07-28 |
| 9023732 | Processing systems and methods for halide scavenging | Anchuan Wang, Xinglong Chen, Hiroshi Hamana, Zhijun Chen, Ching-Mei Hsu +5 more | 2015-05-05 |
| 8980763 | Dry-etch for selective tungsten removal | Xikun Wang, Ching-Mei Hsu, Nitin K. Ingle, Anchuan Wang | 2015-03-17 |
| 8956980 | Selective etch of silicon nitride | Zhijun Chen, Anchuan Wang, Nitin K. Ingle, Shankar Venkataraman | 2015-02-17 |