Issued Patents All Time
Showing 26–28 of 28 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10563304 | Methods and apparatus for dynamically treating atomic layer deposition films in physical vapor deposition chambers | Adolph Miller Allen, Xianmin Tang, Goichi Yoshidome | 2020-02-18 |
| 10283345 | Methods for pre-cleaning conductive materials on a substrate | Feng Q. Liu, Daping Yao, Alexander Jansen, Joung Joo Lee, Adolph Miller Allen +2 more | 2019-05-07 |
| 9460959 | Methods for pre-cleaning conductive interconnect structures | Feng Q. Liu, Daping Yao, Alexander Jansen, Joung Joo Lee, Adolph Miller Allen +2 more | 2016-10-04 |