Issued Patents All Time
Showing 26–28 of 28 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6841057 | Method and apparatus for substrate polishing | Alain Duboust, Liang-Yuh Chen, Manoocher Birang, Ratson Morad, Paul D. Butterfield | 2005-01-11 |
| 6459382 | Over clamp sensor | — | 2002-10-01 |
| 5978202 | Electrostatic chuck having a thermal transfer regulator pad | Ajay Kumar, Shashank Deshmukh, Weinan Jiang, Rolf Guenther | 1999-11-02 |