Issued Patents All Time
Showing 51–57 of 57 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6177023 | Method and apparatus for electrostatically maintaining substrate flatness | Robert Robertson, Kam S. Law, James T. Gardner | 2001-01-23 |
| 6172322 | Annealing an amorphous film using microwave energy | Robert Robertson, Kam S. Law, Takako Takehara, Taekyung Won, Sheng Sun | 2001-01-09 |
| 6055927 | Apparatus and method for white powder reduction in silicon nitride deposition using remote plasma source cleaning technology | Robert Robertson, Kam S. Law, Dan Maydan | 2000-05-02 |
| 6024044 | Dual frequency excitation of plasma for film deposition | Kam S. Law, Robert Robertson, Jeff Olsen, Carl A. Sorensen | 2000-02-15 |
| 5895548 | High power microwave plasma applicator | Gary C. Ettinger, Kam S. Law | 1999-04-20 |
| 5892328 | High-power, plasma-based, reactive species generator | Kam S. Law, Dan Maydan | 1999-04-06 |
| 5788778 | Deposition chamber cleaning technique using a high power remote excitation source | Kam S. Law, Dan Maydan | 1998-08-04 |