Issued Patents All Time
Showing 26–31 of 31 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10276353 | Dual-channel showerhead for formation of film stacks | Kaushik Alayavalli, Xinhai Han, Masaki Ogata, Zhijun Jiang, Allen Ko +6 more | 2019-04-30 |
| 10246772 | Plasma enhanced chemical vapor deposition of films for improved vertical etch performance in 3D NAND memory devices | Allen Ko, Xinhai Han, Thomas Jongwan Kwon, Bok Hoen Kim, Byung Ho Kil +2 more | 2019-04-02 |
| 10199388 | VNAND tensile thick TEOS oxide | Michael Wenyoung Tsiang, Xinhai Han, Bok Hoen Kim, Sang Hyuk Kim, Myung Hun Ju +8 more | 2019-02-05 |
| 9837265 | Gas flow profile modulated control of overlay in plasma CVD films | Prashant Kumar Kulshreshtha, Sudha Rathi, Saptarshi Basu, Kwangduk Douglas Lee, Martin Jay Seamons +5 more | 2017-12-05 |
| 9490116 | Gate stack materials for semiconductor applications for lithographic overlay improvement | Michael Wenyoung Tsiang, Xinhai Han, Nagarajan Rajagopalan, Bok Hoen Kim, Tsutomu Kiyohara +1 more | 2016-11-08 |
| 9390910 | Gas flow profile modulated control of overlay in plasma CVD films | Prashant Kumar Kulshreshtha, Sudha Rathi, Saptarshi Basu, Kwangduk Douglas Lee, Martin Jay Seamons +5 more | 2016-07-12 |