Issued Patents All Time
Showing 76–77 of 77 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7540971 | Plasma etch process using polymerizing etch gases across a wafer surface and additional polymer managing or controlling gases in independently fed gas zones with time and spatial modulation of gas content | Xiaoye Zhao, Kenny L. Doan, Ezra Robert Gold, Paul Brillhart, Bruno Geoffrion +2 more | 2009-06-02 |
| 7431859 | Plasma etch process using polymerizing etch gases with different etch and polymer-deposition rates in different radial gas injection zones with time modulation | Xiaoye Zhao, Kenny L. Doan, Ezra Robert Gold, Paul Brillhart, Bruno Geoffrion +2 more | 2008-10-07 |